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ALUMINUM BIAS SPUTTERING FOR FILM COVERAGE IMPROVEMENT
Kobayashi.Shigeru,Shimamura, Hideaki,Sakata, Masao,Fujita, Shouyou,Yajima, Akira,Saito, Hiroshi,Tateishi, Hideki,Sasaki, Shinji 대한전자공학회 1989 ICVC : International Conference on VLSI and CAD Vol.1 No.1
A filter was installed between the sputtering target and the substrate so as to reduce the aluminum deposition arriving with a shallow angle at the substrate in order to study the step coverage improvement by the bias application. It is deduced that the aluminum flowage occurs so that the surface energy is minimized around the via hole. Aluminum films deposited with the pulsed biasing were characterized in which the possible microstructual damage by argon bombardment is to be minimized. This biasing technique should provide with a better process for the step coverage improvement. A sputtering cathode was developed for aluminum bias sputtering which has a substrate current capability as high as 2A for a 5 inch wafer at the substrate voltage around-50V.
Investigation of the Downwash Induced by Rotary Wings in Ground Effect
Yasutada Tanabe,Shigeru Saito,Naoko Ooyama,Katsumi Hiraoka 한국항공우주학회 2009 International Journal of Aeronautical and Space Sc Vol.10 No.1
There are concerns about the influence of the gust wind caused by helicopters affecting the moving vehicles while hovering over the road during rescue activities. For the understanding of such complicated flow, numerical simulation of a rotor hovering above the ground has been carried out, changing the rotor/ground clearances. The rotor thrust is kept constant, and the rotor control is determined by trim adjustments incorporated into the CFD algorithm. Collective pitch angle and the required power decreases with the rotor/ground clearance which agrees with experience. Changes of the flowfield near the rotor with regard to the rotor height are investigated based on the calculated results.
Numerical Study of Blade-Vortex Interaction (BVI) Noise Capturing
Yasutada Tanabe,Shigeru Saito,Keisuke Takasaki,Hajime Fujita 한국항공우주학회 2008 International Journal of Aeronautical and Space Sc Vol.9 No.2
The noise is one of the serious problems concerning helicopters operations. The issue of helicopter external noise generated mainly from a helicopter rotor has always affected the use of rotorcrafts, especially in the urban environment. The noise sources depend on the flight configurations. In particular, a noise generated by the interaction between blades and tip vortices mainly occurs during descent flight. This noise is called blade-vortex interaction (BVI) noise, and this BVI noise is particularly penalizing for helicopters. In this paper, a numerical study to capture the BVI noise is carried out. The numerical study is performed in two phases. In the first phase, a 2D simulation based on parallel BYI event of Kitapliglu et al experiment is performed. In the second phase, 3D simulation based on HART Ⅱ experiment is performed. Several experimental data such as thrust, torque, blade sectional load, its derivative and vortex location are compared with calculation results and the comparison showed reasonably good agreement.
Numerical Study of Blade-Vortex Interaction (BVI) Noise Capturing
Yasutada Tanabe,Shigeru Saito,Takasaki Keisuke,Hajime Fujita 한국항공우주학회 2008 한국항공우주학회 학술발표회 논문집 Vol.- No.-
The noise is one of the serious problems concerning helicopters operations. The issue of helicopter external noise generated mainly from a helicopter rotor has always affected the use of rotorcrafts, especially in the urban environment. the noise sources depend on the night configurations. In particular, a noise generated by the interaction between blades and tip vortices mainly occurs during descent night. This noise is called blade-vortex interaction (BVI) noise, and this BVI noise is particularly penalizing for helicopters. In this paper, a numerical study to capture the BVI noise is carried out. The numerical study is performed in two phases. In the first phase, a 2D simulation based on parallel BVI event of Kitapliglu et al experiment is performed. In the second phase, 3D simulation based on HART Ⅱ experiment is performed. Several experimental data such as thrust, torque, blade sectional load, its derivative and vortex location are compared with calculation results and the comparison showed reasonably good agreement.
Investigation of the Downwash Induced by Rotary Wings in Ground Effect
Yasutada Tanabe,Shigeru Saito,Naoko Ooyama,Katsumi Hiraoka 한국항공우주학회 2008 한국항공우주학회 학술발표회 논문집 Vol.- No.-
There is concerns about the influence of the gust wind caused by helicopter affecting on the moving vehicles while the helicopter hovering over the road during the rescue activity. For the understanding of such complicated flow, numerical simulation of a rotor hovering above the ground has been carried out by changing the rotor/ground clearances. The rotor thrust is kept constant, and the rotor control is determined by trim adjustments incorporated into the CFD algorithm. Collective pitch angle and the required power decreases with the rotor/ground clearance which agrees with the experiences. Changes of the flow field near the rotor with regard to the rotor height are investigated based on the calculated results.
Investigation of the Downwash Induced by Rotary Wings in Ground Effect
Tanabe, Yasutada,Saito, Shigeru,Ooyama, Naoko,Hiraoka, Katsumi The Korean Society for Aeronautical and Space Scie 2009 International Journal of Aeronautical and Space Sc Vol.10 No.1
There are concerns about the influence of the gust wind caused by helicopters affecting the moving vehicles while hovering over the road during rescue activities. For the understanding of such complicated flow. numerical simulation of a rotor hovering above the ground has been carried out, changing the rotor/ground clearances. The rotor thrust is kept constant. and the rotor control is determined by trim adjustments incorporated into the CFD algorithm. Collective pitch angle and the required power decreases with the rotor/ground clearance which agrees with experience. Changes of the flowfield near the rotor with regard to the rotor height are investigated based on the calculated results.
Numerical Study of Blade-Vortex Interaction (BVI) Noise Capturing
Tanabe, Yasutada,Saito, Shigeru,Takasaki, Keisuke,Fujita, Hajime The Korean Society for Aeronautical and Space Scie 2008 International Journal of Aeronautical and Space Sc Vol.9 No.2
The noise is one of the serious problems concerning helicopters operations. The issue of helicopter external noise generated mainly from a helicopter rotor has always affected the use of rotorcrafts, especially in the urban environment. The noise sources depend on the flight configurations. In particular, a noise generated by the interaction between blades and tip vortices mainly occurs during descent flight. This noise is called blade-vortex interaction (BVI) noise, and this BVI noise is particularly penalizing for helicopters. In this paper, a numerical study to capture the BVI noise is carried out. The numerical study is performed in two phases. In the first phase, a 2D simulation based on parallel BYI event of Kitapliglu et al experiment is performed. In the second phase, 3D simulation based on HART Ⅱ experiment is performed. Several experimental data such as thrust, torque, blade sectional load, its derivative and vortex location are compared with calculation results and the comparison showed reasonably good agreement.