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김영순,( Jay J. Senkevich ),( Toh-ming Lu ),양회창,김길성,신형식 한국화학공학회 2007 화학공학의이론과응용 Vol.10 No.1
Because of the gap filling capability, many researchers have studied Cu electrochemical plating and electroless plating. Electroless deposition (ELD) of Cu already used in electronic packaging, and in the fabrication of Cu on-chip interconnects to fill features. Cu ELD typically requires a catalytic surface to oxidize the reducing agent. Typical catalytic materials are platinum(Pt), palladium(Pd), silver(Ag), gold(Au), rhodium(Rh), or iridium(Ir), where Pd is preferred. In this work, we have deposited Pd by atomic layer deposition, and then we have to deposit Cu by electroless plating. The blanket and patterned TaN of 10 nm thick was obtained from Intel with the size of 130 nm and aspect ratio of 2. Palladium film of 3 nm was deposited on TaN by atomic layer deposition. Chemicals were used in ethylenediaminetetraacetic acid (EDTA) as chelating agent, glyoxylic acid as a reducing agent, and additional chemicals such as RE-610 and 2,2’dipyridine is surfactant and stabilizer individually. The pH of bath was adjusted ∼12.5 with tetramethyammonium hydroxide (TMAH). The solution temperature was maintained at 65℃. There has been success the super-filling and fill-up on TaN.
Viktoriya L. Pogrebnaya,Natalia O. Kodatska,Viktoriia D. Khurdei,Vitalii M. Razzhyvin,Lada Yu. Lichman,Hennadiy A. Senkevich International Journal of Computer ScienceNetwork S 2023 International journal of computer science and netw Vol.23 No.2
The article focuses on the areas of education activities in using techniques for teaching and learning with information and communication technologies (ICTs), researching and analyzing the available ICTs, gearing the technologies to the specific psychological and pedagogical conditions, independently building and modeling ICTs, enlarging and developing their use in the learning environment. The visualization of scientific research has been determined to be part of the educational support for building students' ICT competence during teaching and learning and is essential to the methodology culture. There have been specified main tasks for pedagogy technologies (PTs) to develop the skills of adaptability to the global digital space in students, their effective database operation and using the data bases as necessary elements for learning and as part of professional training for research. We provided rationalization for implementing the latest ICTs into the Ukrainian universities' curricula, as well as creating modern methods for using the technologies in the learning / teaching process and scientific activities.