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        A Study of the CMP Effect on the Quality of Thin Silicon Films Crystallized by Using the μ-Czochralski Process

        J. Derakhshandeh,M. R. Tajari Mofrad,R. Ishihara,J. Van der Cingel,C. I. M. Beenakker 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.54 No.1

        In this paper, the eect of chemical mechanical polishing on the μ-Czochralski process for amorphous silicon crystallization is reported. Amorphous silicon is deposited on both planarized and non-planarized surfaces in a low pressure chemical vapor deposition (LPCVD) system at 545 ℃ and is crystallized using a μ-Czochralski process. Large and regular single silicon grains are obtained on both planarized and non-planarized surfaces at high laser energies. However, at low laser energies, non-planarized surfaces deform the grains. This technique is used to stack silicon layers to realize three-dimensional integrated circuits using thin-film transistors at low temperatures. For 3D-IC advantages, planarized surfaces are needed and chemical mechanical polishing (CMP) has a key role in this process. Thin-film transistors were fabricated on planarized surface and showed high mobilities for nMOS and pMOS transistors of more than 450 cm<SUP>2</SUP>/Vs and 250 cm<SUP>2</SUP>/Vs, respectively.

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        Treatment of industrial wastewater contaminated with recalcitrant metal working fluids by the photo-Fenton process as post-treatment for DAF

        Mohammad Mehdi Amin,Mohammad Mehdi Golbini Mofrad,Hamidreza Pourzamani,Seyed Mohammad Sebaradar,Karim Ebrahim 한국공업화학회 2017 Journal of Industrial and Engineering Chemistry Vol.45 No.-

        Post-treatment of the industrial wastewater polluted by metalworkingfluids (MWFs) was performedusing the photo-Fenton process in following of the chemical addition-dissolved airflotation (CA-DAF)unit. Prior to this study, the CA-DAF was operated as full-scale by trial and error. For the photo-Fentonprocess as a pilot-scale batch reactor, initial pH value, FeSO4, and H2O2 concentrations were considered tostudy the effect of different operating conditions on chemical oxygen demand (COD) and total petroleumhydrocarbon (TPH) removals. This hybrid approach revealed removal efficiencies of 99.85% and 98.9% forCOD and TPH in the optimized photo-Fenton process as pH 3, FeSO4: 100 mg/l, and H2O2: 17.8 g/l. The CODdegradation results for the photo-Fenton system indicated that it could be wellfit using a pseudofirstorderkinetic model. By the GC–MS analysis of DAF and applied photo-Fenton effluents, a 73% removalrate of mono(2-ethylhexyl) phthalate was detected. It is likely favorable to increase the biodegradability. The cost analysis of this process for the consumed energy (6 kWh) and chemicals (0.01818 kg FeSO4 and17.15 kg H2O2) was estimated at approximately 26 $ per 1 m3 of DAF effluent. Generally, these resultsimply that the CA-DAF unit followed by photo-Fenton is an effective and practical method for treatingMWFs wastewater.

      • SCISCIESCOPUS

        Analysis of Circular PDMS Microballoons With Ultralarge Deflection for MEMS Design

        Sang-Hee Yoon,Reyes-Ortiz, Vimalier,Kwang-Ho Kim,Young Ho Seo,Mofrad, Mohammad R K IEEE 2010 Journal of microelectromechanical systems Vol.19 No.4

        <P>This paper presents the simplified analytical and numerical analyses of the ultralarge deflection of circular polydimethylsiloxane (PDMS) microballoons (MBs) under pressure for microelectromechanical systems design. The analytical model assuming spherical symmetry on the deformed shape of MB yields a simplified solution on the pressure-normalized maximum deflection and two in-plane principal strains of the ultralargely deflected MB. The accuracy of the theoretical model is evaluated by comparing against the experimental results. Furthermore, by using a computational analysis that incorporates a Mooney-Rivlin model for a PDMS micromembrane, the properties of the PDMS fabricated at a mixing ratio of 10:1 base to catalyst, a curing temperature of 20°C, and a curing time of 48 h are determined for noncircular PDMS micromembrane analysis. In the experimental study, eight types of PDMS MBs, each of which has a membrane radius of 143, 202, 452, or 904 μm and a membrane thickness of 10 or 20 μm, are characterized in air and in cell culture media. A new strain-measuring method using fluorescent polymer microspheres for the PDMS MB is also introduced. The characterization of the PDMS MBs in air validates our theoretical model and shows an increase in elastic modulus as the membrane thickness decreases. The effect of cell culture media on the membrane rigidity of PDMS is also examined for biological applications of PDMS.</P>

      • Passive control of cell locomotion using micropatterns: the effect of micropattern geometry on the migratory behavior of adherent cells.

        Yoon, Sang-Hee,Kim, Young Kyun,Han, Eui Don,Seo, Young-Ho,Kim, Byeong Hee,Mofrad, Mohammad R K Royal Society of Chemistry 2012 Lab on a chip Vol.12 No.13

        <P>Directed cell migration is critical to a variety of biological and physiological processes. Although simple topographical patterns such as parallel grooves and three-dimensional post arrays have been studied to guide cell migration, the effect of the dimensions and shape of micropatterns, which respectively represent the amount and gradient of physical spatial cues, on cell migration has not yet been fully explored. This motivates a quantitative characterization of cell migration in response to micropatterns having different widths and divergence angles. The changes in the migratory (and even locational) behavior of adherent cells, when the cells are exposed to physical spatial cues imposed by the micropatterns, are explored here using a microfabricated biological platform, nicknamed the 'Rome platform'. The Rome platform, made of a biocompatible, ultraviolet (UV) curable polymer (ORMOCOMP), consists of 3 μm thick micropatterns with different widths of 3 to 75 μm and different divergence angles of 0.5 to 5.0. The migration paths through which NIH 3T3 fibroblasts move on the micropatterns are analyzed with a persistent random walk model, thus quantifying the effect of the divergence angle of micropatterns on cell migratory characteristics such as cell migration speed, directional persistence time, and random motility coefficient. The effect of the width of micropatterns on cell migratory characteristics is also extensively investigated. Cell migration direction is manipulated by creating the gradient of physical spatial cues (that is, divergence angle of micropatterns), while cell migration speed is controlled by modulating the amount of them (namely, width of micropatterns). In short, the amount and gradient of physical spatial cues imposed by changing the width and divergence angle of micropatterns make it possible to control the rate and direction of cell migration in a passive way. These results offer a potential for reducing the healing time of open wounds with a smart wound dressing engraved with micropatterns (or microscaffolds).</P>

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