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Free Spectral Range Measurement of Fabry-Perot Cavity using Frequency Modulation
Masato Aketagawa,Takuya Yashiki,Shohei Kimura,Tuan Quoc Banh 한국정밀공학회 2010 International Journal of Precision Engineering and Vol. No.
In this paper, we propose a novel method to measure the free spectral range (FSR) of a Fabry-Perot cavity (FPC)using single-frequency modulation (FM) with one electric optical modulator (EOM) and the null method. A laser beam modulated by the EOM, to which a cosine-wave signal is supplied from a radio frequency (RF) oscillator, is incident on the FPC. The transmission light from the FPC is observed and converted to an RF signal by a highspeed photodetector, and the RF signal is synchronously demodulated with a lock-in amplifier (LIA) by referring to the oscillator. We theoretically and experimentally demonstrate that the LIA signal become null with a steep slope, when the modulation frequency equals the FSR under the condition that the carrier frequency is slightly detuned from the resonance of the FPC. The experimental results show that the proposed method has the capability to determine the FSR by the null method with a small measurement uncertainty.
Patamaporn Chaikool,Masato Aketagawa,Eiki Okuyama 한국정밀공학회 2008 International Journal of Precision Engineering and Vol.9 No.4
Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.
Chaikool, Patamaporn,Aketagawa, Masato,Okuyama, Eiki Korean Society for Precision Engineering 2008 International Journal of Precision Engineering and Vol.9 No.4
Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.
Phase Modulation Homodyne Interferometer with a 10-pm Resolution Using a Tunable Laser Diode
Ishige, Masashi,Matsuura, Fumio,Kawasugi, Masaaki,Aketagawa, Masato Korean Society for Precision Engineering 2007 International Journal of Precision Engineering and Vol.8 No.2
We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.
Phase Modulation Homodyne Interferometer with a 10-pm Resolution Using a Tunable Laser Diode
Masashi Ishige,Fumio Matsuura,Masaaki Kawasugi,Masato Aketagawa 한국정밀공학회 2007 International Journal of Precision Engineering and Vol.8 No.2
We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.