http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
N-Glycan Analysis of Recombinant Human Erythropoietin Produced by Different Cell Culture Methods
Ohseok KWON,Seonyeong BAK,Miseop CHOI,Keunjun KIM,Kyungju HAN,Youngjun SEO,Gihyun KIM,Kyungtak NAM,Jusun NAM,Youngeun KIM,Gisuk JUNG,Kyungmin BAEK,Sookyung SUH,Seunghwa HONG 한국생물공학회 2008 한국생물공학회 학술대회 Vol.2008 No.10
Keunwoo Lee,전형탁,Jeongtae Kim,Keunjun Kim,Seungjin Yeom,Youngjin Lee 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.50 No.4
Co films deposited by using a remote plasma atomic layer deposition (RPALD) method with cyclopentadienyl cobalt dicarbonyl (CpCo(CO)2) as a precursor were investigated. The process parameters, such as the deposition temperature, the plasma power, the process pressure, and the plasma gas, were varied, and the resulting Co films were characterized. The growth rate of the Co film was about 1.1 °A/cycle for a process window between 125 and 175 C. The impurity content of the Co films was minimized using a H2 plasma in the process pressure range between 0.1 and 2 Torr at a plasma power of 300 W. The carbon and the oxygen contents of the Co films were about 7 at.% and below 1 at.%, the detection limit, respectively. The Co films showed a very uniform surface with a root-mean-square (RMS) roughness of 1.51 °A, as determined by using an atomic force microscopy (AFM) analysis. The Co films deposited on contact holes, about 0.12 μm wide and 1.8 μm deep, showed excellent conformal coverage. The compositions of the Co films on the tops and the sidewalls of the contact holes were examined with Auger electron spectroscopy (AES), and the results showed nearly identical compositions.