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Jieqiong Lin,Xian Jing,Mingming Lu,Yan Gu,Baojun Yu,Jiating Tang,Xu Zheng 성균관대학교(자연과학캠퍼스) 성균나노과학기술원 2017 NANO Vol.12 No.3
Organically modified ceramics are used as photoresistors in the present work. The role of every ingredient played in two photon polymerization process is analyzed. A simple, compact and easy to locate experimental scheme is designed to fabricate nanorods in Ormocer. Based on the threshold theory of photon intensity, the lateral size dependences and vertical size dependences of nanorods on laser power and scanning speed are investigated, respectively. Through systematically changing processing parameters, a 136 nm Ormocer suspended nanorod which is beyond diffraction limit resolution is obtained when v = 115 µm/s, P = 58.5 mW. By this means, two photon polymerization techniques show great potential to obtain a limiting resolution of Ormocer. What is more, micro gear, micro chair, photonic crystal and micro annular lens are fabricated in two photon polymerization in order to exhibit excellent mechanical and optical property of Ormocer.
Xian Jing,Kaixuan Wang,Jieqiong Lin,Peng Liu,Yudi Kan,Xu Zheng,Jie Sun,Yingchun Li 성균관대학교(자연과학캠퍼스) 성균나노과학기술원 2019 NANO Vol.14 No.1
Slicing reference data and adaptive slicing algorithm are the key issues to find out appropriate layer thicknesses of three-dimensional (3D) microstructures with free-form surface in two photon polymerization (TPP). In the present work, an adaptive slicing method (ASM) was proposed to improve the fabricating efficiency of 3D microstructures with free-form surface in TPP microfabrication. In the proposed method, slicing reference data were obtained by intersecting a series of vertical planes with the triangular patch format along characteristic directions. Maximum acceptable chordal height played a role as judging criteria to obtain appropriate layer thicknesses. What's more, typical 3D microstructures with free-form surfaces were fabricated with uniform slicing method (USM) and the proposed ASM, respectively. The comparison results showed that the proposed method effectively improved fabricating efficiency, guaranteeing an acceptable surface quality at the same time. This work was expected to provide references for improving fabrication efficiency of complex 3D microstructures in TPP.
Non-resonant 3D Elliptical Vibration Cutting Induced Submicron Grating Coloring
Jianzhong Chen,Mingming Lu,Jieqiong Lin,Jiakang Zhou,Xifeng Fu,Xiaoqin Zhou 한국정밀공학회 2021 International Journal of Precision Engineering and Vol.22 No.4
Surface Submicron grating manufacturing has broad application prospects, which has also been the subject of intensive research and development by scholars with many eff orts. In this paper, a grating coloring manufacturing method is proposed based on three-dimensional elliptical vibration cutting and non-resonant piezoelectric actuator. Based on the mechanism of elliptical motion, an effective cutting depth model was established. Nonlinear interaction of machining parameters (overlap rate, nominal cutting speed, vibration frequency) on the geometry of the grating were analyzed and controllable modulation model of grating geometry was established. The geometrical dimensions of the grating were predicted and grooved experiments were performed on brass and aluminum surfaces. A set of angle-adjustable detection device was designed independently to check the diffraction quality of the grating. The quantitative experimental results show that grating distances of copper and aluminum rods are 752 nm and 684 nm, respectively. The average width of the aluminum rod overall grating is 764 nm, the accuracy error is 9.25%. In addition, aluminum rod gratings can diffractred light at non-specific angles, which is more effective at viewing angle of 70°. The experimental results are in agreement with the theory which have positive significance for expanding the functional surface.