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다기능 5축 가공기용 밀링 및 보링 모듈의 설계 및 해석
박종권(J. K. Park),노승국(S. K. Ro),조용주(Y. J. Cho),안호상(H. S. Ahn) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
In this paper, the spindle modules for multi functional 5 axis machining system based on large turning machine are designed and analyzed. The boring module and milling module are designed to be attached to main spindle with couplings, and the torques is transmitted from spline mechanism. The milling module and boring module were designed considering transmitting torque and power with analytic calculation. The finite element method was used to evaluate static stiffness and dynamic characteristics such as natural frequencies and frequency response functions.
Micro/Meso부품 대응형 마이크로 기계가공시스템 기술 연구
박종권(J.K. Park),노승국(S.K. Ro),김병섭(B.S. Kim),경진호(J.H. Kyung) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as p-Late, μ-milling/drilling machine and μ-grinding machine are the basic elements constructing μ-factory which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with vertical XY VCM stage and air spindle attached on air-bearing Z stage was designed and manufactured. The novel miniature air-bearing stage with slotless linear motor and high speed spindle with magnetic bearing also were designed.
Micro/Meso부품 대응형 마이크로 기계가공시스템 기술 연구
박종권(J.K.Park),경진호(J.H.Kyung),노승국(S.K.Ro),김병섭(B.S.Kim),박중호(J.H.Park) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.5
This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as μ-Late, μ-milling/drilling machine and μ-grinding machine are the basic elements constructing μ-factory which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.
12인치 Wafer Final Polishing 장비 개발
박종권(J-K Park),우에다(T.Ueda),이상열(S.Y.Lee),신현성(H.S.Shin) 한국생산제조학회 2008 한국생산제조시스템학회 학술발표대회 논문집 Vol.2008 No.5
In this paper, we reported a final polishing machine for 300 ㎜ bare wafer. The final polishing system of bare 300 ㎜ wafer is developed for replacing multistage polishing and grinding process with high quality of flatness required in 0.13 ㎛ design rule. The machine had three polishing tables and eight rotating heads that carries wafers attached on a indexing column so that three steps of the process were possible. The machine structure and components were designed and developed with support of numerical analysis for static and dynamic characteristics. The prototype built with utilities were tested, and the results of surface quality and flatness were discussed.
마이크로 팩토리 대응 초소형 기계가공 시스템 기술 개발
박종권(J. K. Park),노승국(S. K. Ro),김병섭(B. S. Kim),경진호(J. H. Kyung),신우철(S. W. Shin) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
In this paper, we present our current work on developing mechanical machining systems for microfacotory which includes a miniaturized turning machine, a SMA (Shape Memory Alloy) tool clamping device and a micro turning machine usign new air bearing stages with a magnet moving slotless linear motor and miniature high speed air spindle combined with magnetic bearing. The 3-axis milling machine was made of commercially available components at Korea Institute of Machinery and Materials. We show its design and numerical results from structural analysis. The new air bearing stage is proposed, and it's unique in the sense that a permanent magnet is used not only for preload but also for motion generation. The usage of the magnet simplifies the structure of the air bearing stage and it will be suitable for small size desktop machines. Two of these stages were constructed for a micro turning machine and tested with machining of a mirror surface. A NCcontrol system using DSP is developed for the micro machines to get flexibility of choosing control algorithm instead of current fixed structure controllers. We are currently evaluating how well the SMA tool clamping fits in the micro-machining systems. We show some experimental results from our first SMA clamping device. A miniature spindle with air bearing and magnetic bearing driven by air turbine is introduced and designed. By introducing magnetic bearings at radial directions, it is possible to control stability and precision of rotation.
박종권(J.K. Park),이득우(D.W.Lee) 한국생산제조학회 2004 한국생산제조시스템학회 학술발표대회 논문집 Vol.2004 No.4
Micro-factory is a small system to produce a small parts and this manufacturing system has advantages such as energy saving, resources saving, and manufacturing space saving. Micro-factory are classified according to production type and has many applications in various industry. In this paper, the basic concept and applications of micro-factory are introduced.
Micro/Meso부품 대응형 마이크로 기계가공시스템 기술 연구
박종권(J.K. Park),노승국(S.K. Ro),김병섭(B.S. Kim),경진호(J.H. Kyung) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.10
This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as p-Late, μ-milling/drilling machine and μ-grinding machine are the basic elements constructing μ-factory which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with vertical XY VCM stage and air spindle attached on air-bearing Z stage was designed and manufactured. The novel miniature air-bearing stage with slotless linear motor and high speed spindle with magnetic bearing also were designed.