This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as p-Late, μ-milling/drilling machine and μ-grinding machine are the basic elements constru...
This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as p-Late, μ-milling/drilling machine and μ-grinding machine are the basic elements constructing μ-factory which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with vertical XY VCM stage and air spindle attached on air-bearing Z stage was designed and manufactured. The novel miniature air-bearing stage with slotless linear motor and high speed spindle with magnetic bearing also were designed.