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Fabrication Technology of the Focusing Grating Coupler using Single-step Electron Beam Lithography
Tae-YoubKim,Yark-yeonKim,Gee-PyeongHan,Mun-CheolPaek,Hae-SungKim,Byeong-OkLim,Sung-ChanKim,Dong-HoonShin,Jin-KooRhee 한국전기전자재료학회 2002 Transactions on Electrical and Electronic Material Vol.3 No.1
A focusing grating coupler (FGC) was not fabricated by the ‘Continuous Path Control’ writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 × 0.5 mm2 area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.
Hemodynamic Analysis of Coronary Circulation in Angulated Coronary Stenosis Following Stenting
ByoungKwonLee,JuyongLee,BumKeeHong,ByoungEunPark,DongsooKim,Dong-YeonKim,Yun-HyeongCho,Se-JungYoon,YoungWonYoon,HyuckMoonKwon,Hyung-WoonRoh,IlKim,HyeWonPark,Seong-MinHan,Min-TaeCho,SangHoSuh,Hyun-Seun 연세대학교의과대학 2002 Yonsei medical journal Vol.43 No.5