http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
- 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
- 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
RISS 인기검색어
- 검색키워드
- 저자 : DeNardis, Darren (검색결과 9 건)
- 무료
- 기관 내 무료
- 유료
-
Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP
Lee, Hyo-Sang,DeNardis, Darren,Philipossian, Ara,Seike, Yoshiyuki,Takaoka, Mineo,Miyachi, Keiji,Furukawa, Shoichi,Terada, Akio,Zhuang, Yun,Borucki, Len The Korean Institute of Electrical and Electronic 2007 Transactions on Electrical and Electronic Material Vol.8 No.2
High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.
-
Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System
Hyosang Lee,Darren DeNardis,Ara Philipossian,Yoshiyuki Seike,Mineo Takaoka,Keiji Miyachi,Toshiro Doi 한국전기전자재료학회 2007 Transactions on Electrical and Electronic Material Vol.8 No.1
The goal of this study is to determine if High Pressure Micro Jet (HPMJ) conditioning can be used as a substitute for, or in conjunction with, conventional diamond pad conditioning. Five conditioning methods were studied during which 50 ILD wafers were polished successively in a 100-mm scaled polisher and removal rate (RR), coefficient of friction (COF), pad flattening ratio (PFR) and scanning electron microscopy (SEM) measurements were obtained. Results indicated that PFR increased rapidly, and COF and removal rate decreased significantly, when conditioning was not employed. With diamond conditioning, both removal rate and COF were stable from wafer to wafer, and low PFR values were observed. SEM images indicated that clean grooves could be achieved by HPMJ pad conditioning, suggesting that HPMJ may have the potential to reduce micro scratches and defects caused by slurry abrasive particle residues inside grooves. Regardless of different pad conditioning methods, a linear correlation was observed between temperature, COF and removal rate, while an inverse relationship was seen between COF and PFR.
-
Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System
Lee, Hyo-Sang,DeNardis, Darren,Philipossian, Ara,Seike, Yoshiyuki,Takaoka, Mineo,Miyachi, Keiji,Doi, Toshiro The Korean Institute of Electrical and Electronic 2007 Transactions on Electrical and Electronic Material Vol.8 No.1
The goal of this study is to determine if High Pressure Micro Jet (HPMJ) conditioning can be used as a substitute for, or in conjunction with, conventional diamond pad conditioning. Five conditioning methods were studied during which 50 ILD wafers were polished successively in a 100-mm scaled polisher and removal rate (RR), coefficient of friction (COF), pad flattening ratio (PFR) and scanning electron microscopy (SEM) measurements were obtained. Results indicated that PFR increased rapidly, and COF and removal rate decreased significantly, when conditioning was not employed. With diamond conditioning, both removal rate and COF were stable from wafer to wafer, and low PFR values were observed. SEM images indicated that clean grooves could be achieved by HPMJ pad conditioning, suggesting that HPMJ may have the potential to reduce micro scratches and defects caused by slurry abrasive particle residues inside grooves. Regardless of different pad conditioning methods, a linear correlation was observed between temperature, COF and removal rate, while an inverse relationship was seen between COF and PFR.
-
Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP
Hyosang Lee,Darren DeNardis,Ara Philipossian,Yoshiyuki Seike,Mineo Takaoka,Keiji Miyachi,Shoichi Furukawa,Akio Terada,Yun Zhuang,Len Borucki 한국전기전자재료학회 2007 Transactions on Electrical and Electronic Material Vol.8 No.2
High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.
-
Luciana Denardi,Alejandra Conconi 한국라틴아메리카학회 2018 라틴아메리카연구 Vol.31 No.2
This article arises from the confluence of work by two researchers with different backgrounds who have encountered similar methodological difficulties in their research. Conconi holds a degree in Oriental Studies and a postgraduate degree in Chinese Language and Culture with a scholarship from the China Scholarship Council at Harbin Normal University. She is a student in the social anthropology doctoral program at the Instituto de Altos Estudios Sociales (IDAES) of the National University of San Martín (UNSAM). She works as a consultant in Chinese companies and as an applied anthropologist. Denardi began her research with Chinese migrants in 2012, when she began the same PhD program. She had not had any previous contact with Chinese people or institutions, and knew little of the Chinese language, history and geopolitics. Despite the differences, throughout our respective investigations we have faced different situations in which the fieldwork presents challenges. Sharing these situations inspired us to write an article of a methodological nature, whose purpose is to provide other researchers with strategies to develop their work with people who identify themselves as Chinese and Taiwanese. Throughout these pages we realize the importance of history, politics and certain cultural practices extended in many of the consultants as tools to understand their ethnographic present. In the same way, particular conceptions of time and social hierarchies will indicate which are the best methodological strategies in order to generate empathy, and which are not to be recommended.
-
Courtis, Corina,Denardi, Luciana,Lee, Kwang Yoon,Lee, Taeheok 한국외국어대학교 중남미연구소 2021 중남미연구 Vol.40 No.2
This work seeks to contribute to the discussions on the relationships among migration, ethnicity and gender. It is part of a project on the cultural topography of migrations from East Asia in the southern cone of Latin America that combines a quantitative component based on the EAAM (Barry, 2001) with a qualitative component focused on interviews and focus groups. In the case of the Korean community in Buenos Aires, we observe, as an emerging issue, the salience of gender as a dynamic factor that intervenes in the processes of ethnic (de) identification of the daughters of migrants. Specifically, we argue that: 1) in a migration context marked by human rights discourses and policies and historical struggles for gender equality, parental notions and expectations around the traditional role of the “Korean woman” affect the scope and ways of appropriation of the “cultural heritage” and shape the adoption of adaptive strategies, especially those of “assimilation” and “integration” and 2) the struggles for gender equality that develop in the context of origin can inspire changes in the ethnic identification processes. Thus, we try to illustrate how a gender-focused approach can contribute to a better understanding of the ways in which migrants / people of migrant origin adapt culturally in the migratory context. While highlighting the productivity of the methods, qualitative studies intend to enrich quantitative approaches and provide inputs that make the measurement scales more complex.
-
-
Alejandra Conconi,Luciana Denardi 한국라틴아메리카학회 2018 라틴아메리카연구 Vol.31 No.2
This article arises from the confluence of work by two researchers with different backgrounds who have encountered similar methodological difficulties in their research. Conconi holds a degree in Oriental Studies and a postgraduate degree in Chinese Language and Culture with a scholarship from the China Scholarship Council at Harbin Normal University. She is a student in the social anthropology doctoral program at the Instituto de Altos Estudios Sociales (IDAES) of the National University of San Martín (UNSAM). She works as a consultant in Chinese companies and as an applied anthropologist. Denardi began her research with Chinese migrants in 2012, when she began the same PhD program. She had not had any previous contact with Chinese people or institutions, and knew little of the Chinese language, history and geopolitics. Despite the differences, throughout our respective investigations we have faced different situations in which the fieldwork presents challenges. Sharing these situations inspired us to write an article of a methodological nature, whose purpose is to provide other researchers with strategies to develop their work with people who identify themselves as Chinese and Taiwanese. Throughout these pages we realize the importance of history, politics and certain cultural practices extended in many of the consultants as tools to understand their ethnographic present. In the same way, particular conceptions of time and social hierarchies will indicate which are the best methodological strategies in order to generate empathy, and which are not to be recommended.
-
Presence and predominance of histological grade 3 define cT1HG bladder cancer prognostic groups
Leonardo Oliveira Reis,Luciana S. B. Dal Col,Diego M. Capibaribe,Gustavo B. de Mendonça,Fernandes Denardi,Athanase Billis 대한비뇨의학회 2022 Investigative and Clinical Urology Vol.63 No.1
Purpose: Current World Health Organization/International Society of Urological Pathology (2004 WHO/ISUP) grading of bladder urothelial carcinoma relies on the highest pathologic grade of the specimen and does not reflect the inherent qualitative and quantitative heterogeneity of disease. Materials and Methods: We retrospectively studied consecutive urothelial high-grade cT1 (cT1HG) carcinomas submitted to adjuvant bacille Calmette–Guérin between 2008 and 2015 to evaluate the prognostic potential of grade 3 (presence or predominance) according to the 1973 WHO system concerning disease progression and cancer-specific death. Results: Among 253 patients, grading distribution was 34.4% 1+2, 7.5% 2+1, 20.2% 2+2, 19.0% 2+3, 5.1% 3+2, and 13.8% 3+3. Recurrence was diagnosed in 115 (45.5%), progression in 83 (32.8%), and cancer-specific death in 50 patients (19.8%). Mean time to recurrence, progression, and death from disease were 35.9±31.7, 47.6±44.5, and 51.2±50.4 months, respectively. Grade 3 presence (2+3, 3+2, or 3+3) occurred in 96 (37.9%) and independently predicted time to progression (p<0.001; hazard ratio [HR], 3.11; 95% confidence interval [CI], 1.88–5.14). Grade 3 predominance (3+2 or 3+3) occurred in 48 (18.9%) and independently predicted time to disease-specific death. Conclusions: Grade 3 presence and predominance are independent predictors of progression and disease-specific death and occur in about 40% and 20% of cT1HG, respectively. Describing qualitative and quantitative heterogeneity in urothelial carcinoma grading might improve the stratification of patients. This gives three prognostic high-grade groups based on WHO/ISUP 1973: prognostic grade group I (grade 3 absence), prognostic grade group II (grade 3 presence), and prognostic grade group III (grade 3 predominance).
연관 검색어 추천
이 검색어로 많이 본 자료
활용도 높은 자료
