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DDPO₄ 와 ODPO₄ SAM 코팅의 나노 응착 및 마찰 특성 연구
윤의성(Eui-Sung Yoon),양승호(Seung Ho Yang),공호성(Hosung Kong),Andrei Ya Grigoriev 한국트라이볼로지학회 2002 한국트라이볼로지학회 학술대회 Vol.35 No.-
Nano adhesion between SPM (scanning probe microscope) tips and DDPO₄ (dodecylphosphoric acid ester) and ODPO₄ (octadecylphosphoric acid ester) SAM (self-assembled monolayer) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes with the applied normal load. DDPO₄ and ODPO₄ SAM were formed on TiMe and TiOx surfaces. TiMe and TiOx were coated on the Si wafer by ion sputtering. Adhesion and friction of DDPO₄ and ODPO₄ SAM surfaces were compared with those of OTS (octadecyltrichlorosilane) SAM and DLC surfaces. DDPO₄ and ODPO₄ SAM converted the TiMe and TiOx surfaces to be hydrophobic. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare surfaces. Work of adhesion was also discussed to explain how the surface was converted into hydrophobic. Results also showed that tribological characteristics of DDPO₄ and ODPO₄ SAM had good properties in the adhesion, friction, wetting angle and work of adhesion. DDPO₄ and ODPO₄ SAM could be one of the candidates for the bio-MEMS elements.