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백색 LED 증착용 MOCVD 장치에서 유도가열을 이용한 기판의 온도 균일도 향상에 관한 연구
홍광기(Kwangki Hong),양원균(Wonkyun Yang),주정훈(Junghoon Joo),이승호(Seungho Lee),이태완(Tae-Wan Lee) 한국표면공학회 2010 한국표면공학회지 Vol.43 No.6
Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.