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자성유체의 온도에 따른 점성 변화를 이용한 미소 유체 소자
최범규 ( Bum Kyoo Choi ),오재근 ( Jae Geun Oh ),안정재 ( Jeong Jae Ahn ) 한국센서학회 2004 센서학회지 Vol.13 No.6
This study focused on the charateristic of magnetic fluids, the viscosity deviation of magnetic fluids due to temperature changes, and fabrication of a `purely` liquid type microvalve. The viscosity of magnetic fluids decreases sharply during increasing of temperature. The viscosity of magnetic fluids is rated 1,000 cP at the room temperature and 25 cP when the temperature reaches 100 ℃. Briefly, it is remarkable that the fluid flow can be controlled by the temperature and this characteristic can be adopted to the microfluidics as a microvalve. The fabrication of a liquid type microvalve is more easy than solid state microvalves and which can increase an efficiency of the controlability with respect to the thermopneumatic micropump which is studied broadly for many years. When the magnetic fluid used as a sealant for high level sealing, the pressure leakage is less than solid state microvalve. The experimental results show that the pressure drop in microchannel. filled with the magnetic fluid, is significant in the temperature range of 20 ℃~50 ℃ and this result explains why the use of magnetic fluids is possible as a microvalve searcher uses this characteristics. Well known thermo-pnumatic.
SOG(Silicon On Glass)공정을 이용한 수평형 미소가속도계의 제작에 관한 연구
최범규 ( Bum Kyoo Choi ),장태하 ( Tae Ha Chang ),이창길 ( Chang Kil Lee ),정규동 ( Kyu Dong Jung ),김종팔 ( Jong Pal Kim ) 한국센서학회 2004 센서학회지 Vol.13 No.6
The resolution of the accelerometer, fabricated with MEMS technology is mainly affected by mechanical and electrical noise. To reduce mechanical noise, we have to increase mass of the structure part and quality factor related with the degree of vacuum packaging. On the other hand, to increase mass of the structure part, the thickness of the structure must be increased and ICP-RIE is used to fabricate the high aspect ratio structure. At this time, footing effect make the sensitivity of the accelerometer decreasing. This paper presents a hybrid SOG(Silicon On Glass) Process to fabricate a lateral silicon accelerometer with differential capacitance sensing scheme which has been designed and simulated. Using hybrid SOG Process, we could make it a real to increase the structural thickness and to prevent the footing effect by deposition of metal layer at the bottom of the structure. Moreover, we bonded glass wafer to structure wafer anodically, so we could realize the vacuum packaging at wafer level. Through this way, we could have an idea of controlling of quality factor.
자성유체의 자기적 거동특성을 이용한 광 스위치에 관한 연구
최범규 ( Bum Kyoo Choi ),오재근 ( Jae Geun Oh ),김도형 ( Do Hyung Kim ),송관민 ( Kwan Min Song ) 한국센서학회 2005 센서학회지 Vol.14 No.1
This paper presents the development of the optical switch using magnetic behavior of magnetic fluids, which is expected to be used broadly in high-speed information communication. The magnetic fluids for switching an incident light, have the magnetic characteristics of magnetic materials and fluidity of liquids, simultaneously. The relations are derived between the intensity of magnetic field and the angle of optical fiber which is bent by a behavior of magnetic fluid when the magnetic field is applied. When optical switch is implemented by the movement of liquid using magnetic fluid, the existing problem of durability for optical switch will be improved. Thus, this study shows the feasibility of the application for the optical switches using magnetic fluids.
정전기력으로 구동되는 마이크로 캔틸레버 질량 센서의 제작과 특성
이정철 ( Jung Chul Lee ),최범규 ( Bum Kyoo Choi ) 한국센서학회 2011 센서학회지 Vol.20 No.1
Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a 40 μm long, 7 μm wide, and 3 μm thick cantilever, we achieved sub-femtogram mass resolution in a 1 Hz bandwidth.
무선 무전원 압력 센서 적용을 위한 Metglas 기초연구
송기철(Ki-Chul Song),이우훈(Woo-Hoon Lee),최범규(Bum-Kyoo Choi),오재근(Jae-Geun Oh) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
Magnetoelastic thin film sensors can be considered the magnetic analog of suface acoustic wave sensors, with the characteristic resonant frequency of the manetoelastic sensor changing in response to different environmental parameter. we report on the application of magnetoelastic sensors for remotely queried pressure sensor.
LOC적용을 위한 마이크로믹서에 대한 시뮬레이션 및 해석
이승현(Seung-Hyeon Lee),강호진(Ho-jin Kang),최범규(Bum-kyoo Choi) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
This paper presents the simulation result of novel micro mixer. Existing micro mixer is classified by mixing principle as active mixing and passive mixing. Both mixing principle has problems. For solving these problems, this research developed novel micro mixers based on a totally different principle compared with former principles. The mixer not only have a simple structure compared with former ones but also are able to achieve high mixing efficiency in spite of low power consumption due to using Lorentz Force. In addition, it is designed to increase the efficiency of mixing by changing the rotating direction of fluid with a polar switching circuit. Driving forces of the mixer are Lorentz force and a moving force of fluid due to electrophoresis. Because the efficiency of mixer is affected by electrode shape, it made several model. To estimate a efficiency of each mixer, it took simulation. In simulation, mixing flow of best efficiency mixer seem barrier embedded chaotic flow.