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분무 열분해 CVD법으로 이동 중인 LaAlO_3(100) 단결정 위에 증착시킨 YBCO 박막의 특성
김재근,홍석관,김호진,유석구,조한우,안지현,주진호,이희균,홍계원,Kim, Jae-Gun,Hong, Suk-Kwan,Kim, Ho-Jin,Yu, Seok-Koo,Cho, Han-Woo,Ahn, Jin-Hyun,Joo, Jin-Hoo,Lee, Hee-Gyoun,Hong, Gye-Won 한국초전도학회 2006 Progress in superconductivity Vol.8 No.1
YBCO films were deposited on a moving substrate by a spray pyrolysis method using nitrate aqueous solution as precursors. Deposition was made on $LaAlO_3$(100) single crystal substrate by spraying precursor droplets generated by a concentric nozzle. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:4.5. The distance between nozzle and substrate was 15 cm. Substrate was transported with a speed ranging from 0.23 cm/min to 0.5 cm/min. Films were deposited at the pressure ranging from 10 Torr to 20 Torr and the deposition temperature was ranged from $740^{\circ}C\;to\;790^{\circ}C$. Oxygen partial pressure was controlled between 1 Tow and S Torr. Superconducting YBCO films were obtained from $740^{\circ}C\;to\;790^{\circ}C$ with an oxygen partial pressure of 3 Torr. Scanning electron microscope(SEM) and X-ray diffraction(XRD) observation revealed that films are smooth and highly texture with(001) plans parallel to substrate plane. Highest Jc was 0.72 $MA/cm^2$ at 77K and self-field for the film with a thickness of 0.15 m prepared at a substrate temperature of $740^{\circ}C$ and $PO_2$=3 Torr.
질산염 무기금속 화합물의 분무열분해법에 의한 High-$J_c$ YBCO 박막 제조
홍석관,김재근,김호진,조한우,유석구,안지현,주진호,이희균,홍계원,Hong, Suk-Kwan,Kim, Jae-Gun,Kim, Ho-Jin,Cho, Han-Woo,Yu, Seok-Koo,Ahn, Jin-Hyun,Joo, Jin-Hoo,Lee, Hee-Gyoun,Hong, Gye-Won 한국초전도학회 2006 Progress in superconductivity Vol.8 No.1
High $J_c$ over 1 $MA/cm^2$ YBCO film has been successfully prepared using nitrate precursors by spray pyrolysis method. Aerosol drolpets generated using a concentric spray nozzle were directly sprayed on a $LaAlO_3$(100) single crystal substrate. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:1.35. The distance between nozzle and substrate was 15 cm. Deposition temperature was ranging from $750^{\circ}C\;to\;800^{\circ}C$. Deposition pressure was 100 Torr, and oxygen partial pressure was varied from 10 Torr to 50 Torr. The microstructure, phase formation, texture development and superconducting properties of deposited films were largely changed with oxygen partial pressure. Deposited films showed a texture with(001) planes parallel to substrate plane. High quality film was obtained when film was deposited at $760^{\circ}C$ with an oxygen partial pressure of 30 Torr. The critical current density($J_c$) of the YBCO film was 1.75 $MA/cm^2$ at 77 K and self-field.