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박천홍(C. H. Park),이영준(Y. J. Lee),홍성욱(S. W. Hong),이후상(H. S. Lee) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
A self-compensated water-hydrostatic bearing has advantages in bearing stiffness. In this paper, the mechanism is applied to hydrostatic journal bearing for achieving the high bearing stiffness. The finite element method is applied to analyze the load characteristics of the self-compensated journal bearing. From the analyzed results, it is confirmed that though the selfcompensated journal bearing has higher load capacity and stiffness than conventional fixed capillary journal bearing, the merit is decreased in the case of high eccentricity, that is, a spindle system with self-compensated journal bearing must be designed to have the load capacity large enough. For improving the practicality, a rectangular type capillary is introduced and discussed. Theoretically analyzed results show that it has more advantages than the conventional annular type capillary in the practical usage. The experimental verification on the analysis method is performed, and the experimental results show good agreement with theoretical results.
김경호(G. H. Khim),박천홍(C. H. Park),이후상(H. S. Lee),김승우(S. W. Kim) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.