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이은열 ( Eun Yul Lee ),장중순 ( Joong Soon Jang ) 대한설비관리학회 2013 대한설비관리학회지 Vol.18 No.2
Since the introduction of QS9000, TS16949 and Six Sigma, process FMEA is widely used to improve the manufacturing process and build up control plans. However, it is seldom the case that a company gets complete benefits of the process FMEA. To overcome the problem and suggest a direction to follow, a maturity model of process FMEA is developed. The model is composed of critical 5 success factors and 46measurement items derived from experts`` opinion and similar models for 6 Sigma and quality management. The suitability of the model is proven by applying it to the Korean semiconductor manufacturers.
반도체 업체 특성을 고려한 프로세스 FMEA 불량모드에 대한 연구
이은열 ( Eun Yul Lee ),장중순 ( Joong Soon Jang ) 대한설비관리학회 2013 대한설비관리학회지 Vol.18 No.2
This paper presents the failure mode study of process FMEA (failure mode and effects analysis) based on the characteristics for semiconductor industry. To identify failure modes, we first divide the process into modified one and new one. For the former, failure modes are driven from the master FMEA, the previously prepared FMEA DB, and similar processes FMEAs previously analyzed. For the latter, a systematic study for process function is done firstly and then failure modes are identified according to the cases where the function is absent, surplus, insufficient, intermittent, and unexpected and the characteristics of the process itself and inspection methods. Those failure modes are stored in the master FMEA. A case study is also given.