http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
High Impedance Filter를 이용한 RF Loss 최소화 방법에 대한 연구
왕현철,서화일,Wang, Hyun-Chul,Seo, Hwa-Il 한국반도체디스플레이기술학회 2020 반도체디스플레이기술학회지 Vol.19 No.1
This study designed High impedance filter to reduce RF loss to heater heating wire and increase RF current flowing to heater ground wire. Effects such as D / R improvement and process reproducibility could be seen. In addition, RF parameter distribution optimization was possible by understanding the RF path of PE-CVD equipment using Plasma and designing filter.
왕현철,서화일,Wang, Hyun-Chul,Seo, Hwa-Il 한국반도체디스플레이기술학회 2020 반도체디스플레이기술학회지 Vol.19 No.1
This study analyzes the method of adhesion and improvement between heat.er and RF filter in PE-CVD equipment through TRIZ method and proposes a solution. TRIZ Solution such as function analysis, 9-window matrix, ASIT, and Root cause analysis were used. The contact temperature between the heater and the RF filter was 20% and the surface temperature was lowered to 5.7℃, suggesting an improvement method for the thermal expansion of the PE-CVD equipment hot zone.