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오광환(Kwang H. Oh),이민규(M. K. Lee),김수근(S. G. Kim),임현택(H. T. Lim),정성호(S. H. Jeong) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
High-aspect-ratio(max. 12.5) microchannels with excellent surface quality and good shape uniformity have been realized utilizing laser-induced etching technique. Etch width and depth variations depend largely upon process variables such as laser power and etchant concentration. Etchant concentration in association with viscosity also influence on the cross-sectional profile of the channels. The optimum process conditions for the fabrication of high-aspect-ratio microchannels applicable to micro thermal devices are demonstrated.
임현덕(H. D. Im),오광환(K. H. Oh),임현택(H. T. Lim),정성호(S. H. Jeong) 한국레이저가공학회 2008 한국레이저가공학회 학술대회 논문집 Vol.2008 No.-
An optical fiber-based laser etching technique is used to fabricate microgrooves on stainless steel foil. A nozzle structure that produces an etchant jet is designed and utilized in experiments so that the application of laser etching technique can be extended to arbitrary size workpiece. The fabricated microgrooves can be applied for the wick-structure of micro heat pipes through which the circulation of working fluid occurs by capillary pressure. The capillary pressure of the microgrooves depends on the parameters including working fluid, groove size and shape, and surface roughness, and directly influences on the performance of micro heat pipes. The capillary flow velocity for varying groove parameters is measured to examine the relationship between groove parameters and cooling capacity of micro heat pipes.