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FeMX(M = Mo, Ta, X=N, C) 박막의 자기 특성 및 미세구조 변화
신동훈(D. H. Shin),최운(W. Choi),김형준(H. J. Kim),남승의(S. Y. Nam),안동훈(D. H. Ahn) 한국자기학회 1995 韓國磁氣學會誌 Vol.5 No.5
Magnetic properties of FeMoN, FeMoTaN, FeTaN and FeTaC films deposited by DC magnetron reactive sputter were investigated, and correlated with their microstructure. FeMoN films were not showen the soft magnetic properties, because of generated Fe₂Mo, Fe_(3-2)N and Fe₄N phases. Ta added films, however, effectivly retarded the α-Fe grain growth and suppressed the generation of Fe nitrides or carbides during heat treatement. The soft magnetic properties of Bs: 15 kG, Hc: 0.25 Oe, μ' 4000(at 5 ㎒), and Bs: 14.5 kG, Hc: 0.25 Oe, μ': 2700 (5㎒) were observed in Fe_(78.8)Ta_(8.5)N_(12.7) and Fe_(75.6)Ta_(8.l)C_(16.3) films, respectively.
FeTaNC 초미세결정박막의 반응가스 분압에 따른 자기특성 변화
고태혁(T. H. Koh),신동훈(D. H. Shin),김형준(H. J. Kim),남승의(S. E. Nam),안동훈(D. H. Ahn) 한국자기학회 1996 韓國磁氣學會誌 Vol.6 No.3
Magnetic properties and microstructures of FeTaNC thin films, which were deposited by magnetron reactive sputtering method, were investigated as a function of CH₄ and N₂ gas partial pressures. Magnetic properties of FeTaNC films depended on total reactive gas pressure as well as CH₄/N₂ pressure ratios. For reactive gas partial pressures of 5~10%, optimum magnetic properties were observed in the FeTaNC films with proper CH₄/N₂ ratio. On the other hand, at 15 % of gas partial pressure, FeTaN and FeTaC films showed superior properties to FeTaNC films. Above 15%, the magnetic properties of films rapidly degraded due to an excess incorporation of C and/or N atoms. Excellent soft magnetic properties of 17 kG of Bs, 0.3 Oe of Hc, and 4000 of μ′ (at 5 ㎒) were obtained in the FeTaNC films. High permeabilities of FeTaNC films could be explained by the Fe lattice distortion caused by N atoms, hence reduction of magnetic anisotopy. While precipitated TaN and TaC particles effectively supress the growth of α-Fe grains leading to a good soft magentic properties, FeN and FeC phases such as Fe₃N, Fe₄N, Fe_xC have detrimental effects.
박막 자기 저항 헤드용 자기교환 결합 NiFe / TbCo 박막
오장근(J. G. Oh),조순철(S. C. Jo),안동훈(D. H. Ahn) 한국자기학회 1993 韓國磁氣學會誌 Vol.3 No.4
Exchange coupled NiFe / TbCo / SiO₂ thin films for magnetoresistive heads were sputter deposited using RF diode sputtering method, and their magnetic characteristics were measured TbCo films were deposited using a composite target, which is composed of Tb chips epoxied on a Co target. NiFe(400 Å) / TbCo(1500 Å) / SiO2(500 Å) films were deposited using a TbCo target having 30 % of Tb area ratio, which showed 25 Oe of the exchange field without substrate bias and 12 Oe with -55 V of substrate bias. The effective in-plane coercivities of the three layer films fabricated with less than -55 V of substrate bias were approximately proportional to the perpendicular coercivities of the TbCo layer only. The films fabricated with a TbCo target of 28 % area ratio showed the same trend. However, the exchange field decreased to 4 Oe without the substrate bias and 7 Oe with -55 V of substrate bias. In the films fabricated with 1000 W of power and the target of 36 % area ratio exhibited 100 Oe of exchange field and 3 Oe of coercivity. As the thickness of NiFe layer increased, the exchange field decreased.
미결정 FeZrN 박막의 자기특성 및 내식성에 미치는 Cr 첨가 효과
김태영(T. Y. Kim),강남석(N. S. Kang),송기창(K. C. Song),조삼제(S. J. Cho),안동훈(D. H. Ahn) 한국자기학회 1994 韓國磁氣學會誌 Vol.4 No.2
With the variation of Cr content and N₂ flow ratio, the soft magnetic properties, corrosion resistance and reactivity of the sputtered nanocrystalline FeZrCrN thin flims were investigated. In case of FeZrCrN thin films, a saturation magnetization was decreased with increasing N₂ flow ratio. In addition, good soft magnetic properties were obtained at the flow ratio of 3% N₂. The Fe_(64.9)Zr_(8.8)Cr_(5.8)N_(20.5) nanocrystalline thin film after annealing at 550℃ exhibited the saturation magnetization of 12.5kG, low coercivity of 0.4 Oe and high permeability of 2600 at 5㎒. Films containing up to 7.5% Cr showed an enhanced corrosion resistance and reduced reactivity with the bonding glass without degradation of soft magnetic properties, although the saturation magnetization was decreased slightly with the Cr addtion.