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바이오 셀 및 마이크로 부품 handling을 위한 pneumatic line을 갖는 in-plane형 마이크로 압전 그리퍼 제조 및 특성
박준식(J. S. Park),박광범(K. B. Park),신규식(K. S. Shin),문찬우(C. W. Moon) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
In-plane type micro piezoelectric micro grippers with pneumatic lines for manipulation biological cells and micro parts were designed, fabricated, and characterized. Micro grippers were fabricated through the final micro-sanding process after wafer level bonding between the etched 4" Si wafer with pneumatic channels and 4" glass wafer. Displacements between two jaws of fabricated micro grippers were linearly increased with applying voltages to piezoelectric actuator. In the case of applying 80 V, the displacement between two jaws was 160 ㎛. Using fabricated micro grippers, manipulation tests for biological cell and micro parts with the sizes less than 100 ㎛ are in process.