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RISS 인기검색어
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- 저자 : 손병기 ( Jae Hee Park (검색결과 3 건)
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박재희,김명규,손병기 ( Jae Hee Park,Myung Gyoo Kim,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.6
The feasibility of producing a practical buried fiber optic sensor with high sensitivity for detecting intruders is demonstrated. Experiments were carried out with the use of an all fiber Michelson interferometer, the sensing arm of which was buried in sand. When the sensing arm was buried 8 inches deep in sand, the pressure length product required for a half fringe shift in the sensor output was 1.09 kPa·m. The relation between the applied weight and the phase change was. almost linear. Experimental results indicated that the sensitivity of the optical fiber sensor was sufficient to detect people on foot and vehicles passing over the buried fiber.
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박재희,김명규,손병기 ( Jae Hee Park,Myung Gyoo Kim,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.6
In order to develop gas sensor operating at low temperature, thick film Co₃O₄ sensor was fabricated. Co₃O₄ powder was prepared by precipitation from cobalt nitrate solution and the powders containing ethylene glycol as a binder was screen-printed on alumina substrate. Characteristics of sensitivity, response time, and recovery were investigated in terms of binder content and heat treating conditions. The Co₃O₄ sensor contained 15% ethylene glycol and heat-treated at 300℃ for 24hr showed the highest sensitivity at the operating temperature of 250℃. Its sensitivity of 1.1 to 5000ppm butane gas was very high, as compared with 0.8∼0.85 at the operating temperature of 350∼400℃ for a commercial SnO₂ gas sensor. It is found that response time was fast, but recovery was poor for the sensor.
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김명규(Myung-Gyoo Kim),권대혁(Dae-Hyuk Kwon),김진변(Jin-Sup Kim),박재희(Jae-Hee Park),이정희(Jung-Hee Lee),손병기(Byung-Ki Sohn) 한국진공학회(ASCT) 1997 Applied Science and Convergence Technology Vol.6 No.3
실시콘 미세가공기술로 형성된 프레임 모양의 실리콘 기판에 의해 지지되는 100 ㎚-Au/30 ㎚-NiCr/150 ㎚-Si₃N₄/300㎚-SiO₂/150㎚-Si₃N₄ 광반사막을 제조하였으며, 이것을 광섬유와 결합하여 강도형 다모드 광섬유 압력센서를 제작하고 그 특성을 조사하였다. Si₃N₄/SiO₂/Si₃N₄ 다이아프램을 광반사막으로 사용하기 위하여 이 다이아프램의 뒷면에 NiCr 및 Au 박막을 각각 진공증착하여 광반사막에서의 광투과에 의한 광손실을 수 %로 감소시킬 수 있었다. 유전체 다이아프램의 상하에 각각 있는 Si₃N₄막은 KOH 수용액에 의한 실리콘 이방성 식각시 자동시각 정지층 역할을 하여 다이아프램 두께의 재현성이 우수하였다. 다이아프램의 크기가 3×3 ㎟, 4×4 ㎟ 및 5×5 ㎟인 센서는 각각 0~126.64 kPa, 0~79.98 kPa 및 0~46.66 kPa의 압력범위에서 선형적인 광출력-압력 특성을 나타내었으며, 이들 센서의 압력감도는 각각 약 20.69 nW/kPa, 26,70 nW/kPa 및 39.33 nW/kPa로서, 다이아프램의 크기가 증가할수록 압력감도도 증가하였다. An optical intensity-type pressure sensor has been fabricated by coupling multimode optical fiber with 100 ㎚-Au/30 ㎚-NiCr/150 ㎚-Si₃N₄/300 ㎚-SiO₂/150 ㎚-Si₃N₄ optical reflection layer supported by micromachined frame-shape silicon substrate, and its characteristics was investigated. For the application of Si₃N₄/SiO₂/Si₃N₄ diaphragm to the optical reflection layer of the sensor, NiCr and Au films were deposited on the backside of the diaphragm by thermal evaporation, respectively, and thus optical loss caused by transmission in the reflection layer could be decreased to a few percents. Dielectric diaphragms with uniform thickness were able to be also reproduced because top- and bottom-Si₃N₄ layer of the diaphragm could automatically stop silicon anisotropic etching. The respective pressure ranges in which the sensor showed linear optical output power-pressure characteristics were 0~126.64 kPa, 0~79.98 kPa, and 0~46.66 kPa, and the respective pressure sensitivities of the sensor were about 20.69 nW/kPa, 26.70 nW/kPa, and 39.33 nW/kPa, for the diaphragm sizes of 3×3 ㎟, 4×4 ㎟, and 5×5 ㎟, indicating that the sensitivity increases as diaphragm size increases.
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