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시스템 LSI 반도체 FAB의 납기만족을 위한 예약 기반의 디스패칭 룰
서정철(Jeongchul Seo),정용호(Yongho Chung),박상철(Sangchul Park) (사)한국CDE학회 2014 한국CDE학회 논문집 Vol.19 No.3
Presented in the paper is a reservation based dispatching rule to achieve the on-time delivery in system LSI (large scale integrated circuit) semiconductor fabrication (FAB) with urgent orders. Using the proposed reservation based dispatching rule, urgent lots can be processed without waiting in a queue. It is possible to achieve the on-time delivery of urgent orders by reserving a proper tool for the next step in advance while urgent lots are being processed at the previous step. It can cause, however, tardiness of normal lots, because the proposed rule assign urgent lots first. To solve this problem, the proposed rule tries to find the best tool for the reservation in the tool group, which can minimize idle time, and the reservation rule is applied at all tools except for photolithography tools (bottleneck). MOZART® which is developed by VMS solutions are used for simulation experiments. The experimentation results show that the reservation based dispatching rule can achieve the on-time delivery of normal lots as well as urgent lots.
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Backward Pegging을 이용한 반도체 후공정 스케줄링
안의국(Euikoog Ahn),서정철(Jeongchul Seo),박상철(Sang Chul Park) (사)한국CDE학회 2014 한국CDE학회 논문집 Vol.19 No.4
Presented in this paper is a scheduling method for semiconductor backend process considering the backward pegging. It is known that the pegging for frontend is a process of labeling WIP lots for target order which is specified by due date, quantity, and product specifications including customer information. As a result, it gives the release plan to meet the out target considering current WIP. However, the semiconductor backend process includes the multichip package and test operation for the product bin portion. Therefore, backward pegging method for frontend can’t give the release plan for backend process in semiconductor. In this paper, we suggest backward pegging method considering the characteristics of multichip package and test operation in backend process. And we describe the backward pegging problem using the examples.
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