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임영택(Young-Taik Lim),신백균(Paik-Kyun Shin),조기선(K-S Cho),박종관(J-K Park),남광우(K-W Nam),이능헌(N-H Lee),임경범(K-B Lim),정무영(M-Y Cheong),송진호(J-H Song) 대한전기학회 2010 대한전기학회 학술대회 논문집 Vol.2010 No.7
유기전자소자(Organic-TFT 및 Organic-Memory)용 유전체 고분자박막은 높은 유전상수 및 전계강도와 우수한 표면 및 벌크특성을 요구하고 있다. 자체 제작한 13.56[㎒] RF플라즈마 중합장비를 이용하여 정전 결합 플라즈마(CCP) 방법으로 가교된 ppTh(plasma polymerization Thiophene) 박막을 제작하였다. ppTh박막의 유전 및 절연 특성은 알루미늄/ppTh/알루미늄 구조의 콘덴서를 제작하고 측정하였다.
플라즈마 공중합 고분자 절연막과 펜타센 반도체막의 계면특성
신백균(Paik-Kyun Shin),임헌찬(H-C Lim),육재호(J-H Yuk),박종관(J-K Park),조기선(G-S Jo),남광우(K-Y Nam),박종국(J-K Park),김용운(Y-W Kim),정무영(M-Y Chung) 대한전기학회 2009 대한전기학회 학술대회 논문집 Vol.2009 No.7
Thin films of pp(ST-Co-VA) were fabricated by plasma deposition polymerization (PVDPM) technique. Properties of the plasma polymerized pp(ST-Co-VA) thin films were investigated for application to semiconductor device as insulator. Thickness, dielectric property, composition of the pp(ST-Co-VA) thin films were investigated considering the relationship with preparation condition such as gas pressure and deposition time. In order to verify the possibility of application to organic thin film transistor, a pentacene thin film was deposited on the pp(ST-Co-VA) insulator by vacuum thermal evaporation technique. Crystalline property of the pentacene thin film was investigated by XRD and SEM, FT-IR. Surface properties at the pp(ST-Co-VA)/pentacene interface was investigated by contact angle measurement. The pp(ST-Co-VA) thin film showed a high-k (k=4.6) and good interface characteristic with pentacene semiconducting layer, which indicates that it would be a promising material for organic thin film transistor (OTFT) application.