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초정밀 가공기를 위한 환경 제어용 셀에 관한 실험 및 해석적 연구
오상준(S.J. Oh),김철숙(C.S. Kim),조지현(J.H. Cho),김동연(D.Y. Kim),서태범(T.B. Seo),노승국(S.K. Ro),박종권(J.K. Park) 한국생산제조학회 2013 한국생산제조학회지 Vol.22 No.5
In ultra-precision machining, the inside temperature should be controlled precisely. The important factors are environmental conditions (outside temperature, humidity) and temperature conditions (cutting heat, spindle heat). Thus, in this study, an environmental control cell for the ultra-precision machine that could control the inside temperature and minimize effects of the surrounding environment to achieve a thermal deformation of less than 400nm of a specimen was designed and verified through C.F.D. Further, a method that could control the temperature precisely by using a blower, heat exchanger and heater was evaluated. As a result, this study established a C.F.D technic for the environmental control cell, and the specimen temperature was controlled to be within 17.465 ± 0.055℃.