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김재천(Jaecheon Kim),서석현(Sukhyun Seo),전재욱(Jaewook Jeon),박기헌(Kiheon Park),유관호(Kwanho You) 대한전기학회 2006 정보 및 제어 심포지엄 논문집 Vol.2006 No.1
During last years, large investments have been directed to development and research of nano-techNoogical products like semiconductor, display panel, optic-fiber communication components, life techNoogy, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environ-mental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under 100㎛, than laser interferometer. New error correction method for laser interferometry using capacitive sensor will be introduced in this paper.