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金仁九,金容鐸,鄭貴榮 弘益大學校 科學技術硏究所 2003 科學技術硏究論文集 Vol.14 No.-
The preparation of C/SiC composites from the reaction of methyltrichlorosilane (CH3SiCl3 MTS) and hydrogen by pulse-CVI was studied. Effects of pulse time on the infiltration were observed at 950℃, 10% MTS and 40 torr. With the ratios of evacuation time vs. the reaction time(te/tr) such as 10 s/10 s, 20 s/10 s and 30 s/10 s, the infiltration was carried out for 18 hours. In addition, with the reaction times such as 20 s and 30 s, the same processes were performed repeatedly. Pulse-CVI is applied because the product gas, HCl, prevents the reactant gases to infiltrate into the preform. After the inside of reactor are evacuated during the evacuation time, reactant gases are injected during the injection time. By doing so, the reactant gases diffuse far into the preform. As the short injection time prevents from plugging pores, it becomes possible to infiltrate into the preform and fill pores uniformly. The longer the evacuation time becomes, the more uniformly the deposition in the preform was obtained. The infltrated amount was measured by comparing the masses before and after the infiltration and with the analysis of TGA. The shape of deposit was tested with SEM.