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레이저 CVD 텅스텐막 증착을 통한 TFT LCD 불량배선 수리
김석군,손정석,이기선,Kim, Sukoon-Koon,Son, Jeong-Seok,Lee, Gi-Sun 한국전기전자재료학회 2004 전기전자재료학회논문지 Vol.17 No.10
The photodepositioned tungsten film by laser CVD has been carried out the taping test with scotch tape over 10 times. As a result, it exhibited strong adhesion to the under-film such as ITO and SiNx patterned on the LCD substrate. However, it was seriously attacked by alkaline solution used for removing polyimide. And a thickness of laser CVD tungsten film had a close relation to a speed of laser scanning. Also we have improved the success rate of a laser CVD repair with making two pairs of contact hole structure and decreasing laser scanning speed.
진공 Cavity상 멤브레인 구조를 가진 마이크로 유량센서의 단열특성
김석군,전치훈,김윤태,이종현 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
We have proposed a surface-micromachined new microflow sensor to resolve the problems of poor thermal isolation and low sensitivity inherently in typical thermal flow sensors. A membrane of insulating films on a vacuum cavity supports a n'-poly heating resistor and two bidoped poly-Si thermophiles. We have investigated on heat-transfer characteristics of the sensor microstructure with the Sum-depth cavity of 100x100 μm^(2) by a two-dimensional numerical simulation as a function of the inside pressure of the cavity. As a result, the microstructure with the vacuum cavity shows better themal isolation effects than that of the air cavity.