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유연기구를 이용한 초정밀 단일체 3축 스테이지의 모델링 및 최적설계에 관한 연구
심종엽,권대갑,Shim, Jong-Yeop,Gweon, Dae-Gab 대한기계학회 1998 大韓機械學會論文集A Vol.22 No.4
There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.
이문구,권대갑,Lee, Moon-G,Gweon, Dae-Gab 대한기계학회 1997 大韓機械學會論文集A Vol.21 No.5
In this paper, a new modeling of a fine actuator for an optical pick-up has been proposed and multiobjective optimization of the actuator has been performed. The fine actuator is constituted of the bobbin which is supported by wire suspension, the coils which wind around the bobbin, and the magnets which cause the magnetic flux. If current flows in the coils, magnetic force is so produced as to be balanced with spring force of wire, so the bobbin is pisitioned. In this model the transfer function from input voltage to output displacementof bobbin has been obtained so that we can describe this integrated system with electromagnetic and mechanical parts. Wire suspension is regarded as a continuous Euler beam, damper as distributed viscous damping, and bobbin as a rigid body which can move up- and down- ward motion only. According to the model, the high frequency dynamic characteristics of the fine actuator can be known and the effect of damping can be investigated while the conventional second order model cannot. In multiobjective optimization, two objective functions have been chosen to maximize the fundamental frequency and the sensitivity with respect to the input voltage of the actuator so that Pareto's optimal solutions have been obtained using .epsilon.-constraint method. These objective functions will satisfy the trends which will enhance the access speed and reduce the tracking error in the optical pick-up technology of next generation. In the result of optimization, we obtain the designs of the optical pick-up fine actuator which has high speed, high sensitivity and low resonant peak. Furthermore, we offer the relation between two object functions so that the designer can make easy choice.
횡방향 주사를 이용한 광위상 간섭계의 페이즈 언래핑 향상에 대한 연구
박도민,박성림,권대갑,Park, Do-Min,Park, Sung-Lim,Gweon, Dae-Gab 대한기계학회 1998 大韓機械學會論文集A Vol.22 No.3
The biggest problem common on to all forms of Phase Shift Interferometer is unwrapping the phase. Simple phase unwrapping algorithms assume that every pixel is within radians of its neighbors. If this is true, any reasonable algorithm will return the correct unwrapped phase. If not, correct unwrapped phase will not be obtained. In rough surface, frequently, neighboring pixels have phase steps greater than. This paper proposes the new method which makes phase steps smaller than by sub-pixel movement.
이무연(Lee, Moo-Yeon),권대갑(Gweon, Dae-Gab),이동연(Lee, Dong-Yeon) 한국소음진동공학회 2005 한국소음진동공학회 논문집 Vol.15 No.11
This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.