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Novel fabrication technologies of planar nano-gap electrodesfor single molecule evaluation
Ken Tsutsui,Masashi Nakata,Masayuki Morita,Masahide Tokuda,Kazuyuki Nagatsuma,Harumasa Onozato,Tadao Kaneko,Tomohiko Edura,Yoshio Mita,고이누마히데오미,Yasuo Wada 한국물리학회 2007 Current Applied Physics Vol.7 No.4
Present information technologies use semiconductor devices and magnetic/optical disc. However, they are all foreseen to face funda-mental limitations within a decade. Therefore, superseding devices are required for the next paradigm of high performance informationare expected as the most probable candidate to supersede the present semiconductor devices. The rst milestone towards the realizationof single molecule devices in future electronics requires quantitative evaluation of single molecule characteristics, which inevitably needsplanar nano-gap electrodes between which single molecules are sandwiched, observed their structures and measured their electrical char-acteristics. Nano-meter electrode pattern fabrication was achieved by electron beam lithography and metal lift-o, while planarizationprocessing technologies are described in this paper to realize nm-planar nano-scale electrodes.