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Fabrication of Gas-sensing Semiconductor Oxide Thin Films by Using a Short-wavelength Excimer Laser
강준희,박정현,Muhammad Z. Ahmad,Wojtek Wlodarski 한국물리학회 2012 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.61 No.9
Semiconducting metal oxides are widely used in chemical, electronic devices and in gas sensing applications. Among the many different deposition techniques, ablating the target materials with a high power laser is one of the most effective techniques in fabricating high quality gassensitive thin films. In this work, we used a 193-nm-wavelength ArF excimer laser, the shortest wavelength used in the fabrication of semiconductor oxides, to deposit high quality transition-metaloxide thin films. We used X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, optical transmission spectroscopy, and conductivity measurements to characterize the films. The fabricated MoO<sub>3</sub> thin films were observed to show a good nanoplate structure in the orthorhombic α-MoO<sub>3</sub> phase. Depending on the deposition temperatures, MoO3 showed significantly different surface structures. Good gas sensitivity of a MoO<sub>3</sub> thin-film-based sensor exposed to low concentrations ethanol vapor was found by using resistance measurements.
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