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Adhesion Properties of Transparent DLC Films on Polymer Substrates
Chiaki Terashima,Sang-min Baek,Tatsuru Shirafuji,Nagahiro Saito,Osamu Takai 한국표면공학회 2010 한국표면공학회 학술발표회 초록집 Vol.2010 No.11
Transparent diamond-like carbon thin films were synthesized by doping of silicon-oxide using pulse-biased inductively coupled plasma chemical vapor deposition. Optical properties, mechanical properties, and adhesion properties of these films on polymer substrates such as polycarbonate were investigated on the effects of the gas composition and plasma pre-treatment. Silicon-oxide incorporated diamond-like carbon films on polycarbonate had favorable properties of higher deposition rate and wider optical band gap, although too much oxygen incorporation (O/C ratio > 0.15) brought about poor adhesion strength.