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Split sputter mode: a novel sputtering method for flat-panel display manufacturing
Pieralisi, Fabio,Hanika, Markus,Scheer, Evelyn,Bender, Marcus The Korean Infomation Display Society 2011 Journal of information display Vol.12 No.2
Advanced static DC magnetron sputtering methods based on the magnet wobbling technique were investigated to achieve highly uniform and homogeneous metallization layers. The novel split sputter mode (SSM) method, wherein the deposition process is divided into two distinct steps, enables the AKT rotary cathode technology to provide excellent layer properties, while keeping a high production throughput. The effectiveness of theSSMtechnique was demonstrated through copper-coated large-area substrates.
Split sputter mode: a novel sputtering method for flat-panel display manufacturing
Fabio Pieralisi,Markus Hanika,Evelyn Scheer,Marcus Bender 한국정보디스플레이학회 2011 Journal of information display Vol.12 No.2
Advanced static DC magnetron sputtering methods based on the magnet wobbling technique were investigated to achieve highly uniform and homogeneous metallization layers. The novel split sputter mode (SSM) method, wherein the deposition process is divided into two distinct steps, enables the AKT rotary cathode technology to provide excellent layer properties,while keeping a high production throughput. The effectiveness of theSSMtechnique was demonstrated through copper-coated large-area substrates.