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      • KCI등재

        Enhancement of the electrical properties of carbon nanotubes with AreN2 plasma treatment

        M. Abrar,G.U. Farwa,S. Naseer,A. Saeed,A.W. Khan,Z. Iqbal,S. T. Hussain,M. Zakaullah 한국물리학회 2013 Current Applied Physics Vol.13 No.3

        Optical emission spectroscopy and Langmuir probe are used to investigate the low pressure inductively coupled AreN2 plasmas as function of rf power, filling pressure and Ar content in N2 discharge. It is observed that the active species generation, dissociation fraction and electron temperature significantly depends on discharge parameters and may be used to optimize the plasma reactor. Mixture of SWCNTs and MWCNTs are treated for different treatment time (0e120 min) at optimum discharge conditions. Changes induced in the elemental composition, surface morphology, crystallographic structure, and structural disorder in the plasma irradiated CNTs are analyzed by EDX, FTIR, SEM, XRD and Raman spectroscopy, respectively. AreN2 mixture plasma treatment of CNTs lead to a significant increase in the electrical conductivity, modify the microstructure and induce structural disorder and cause a transition of crystalline phase from well crystalline to an amorphous structure.

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        Effect of helium mixing on excitation temperature and nitrogen dissociation in inductively coupled plasma

        M. Abrar,A. Qayyum,A.R. Gilani,A.W. Khan,A. Saeed,S. Naseer,M. Zakaullah 한국물리학회 2013 Current Applied Physics Vol.13 No.6

        Trace rare gas optical emission spectroscopy (TRG-OES) is carried out to investigate the excitation temperature, relative densities of active species (N, N2 +) and nitrogen dissociation in inductively coupled helium admixed nitrogen plasma for different rf power (50, 100, 150 W), pressure (0.2-0.5 mbar) and helium percentage (10-90%) using Ar as an actinometer (4%). The excitation temperature is obtained from Boltzmann plot method using emission intensity of several argon lines. The dissociation of nitrogen has been investigated by both the actinometry method and the ratio ðIN=IN2 Þ of the atomic nitrogen line emission intensity at (746.83 nm) to the vibrational band (0e0) of the N2 second positive system at 337.1 nm. The excitation temperature increases with the increase in power and helium percentage and decreases with increase in fill pressure. The nitrogen dissociation as well as the relative densities of [N] and [N+2] increases with the increase in helium percentage.

      • KCI등재

        Comparative study of electron temperature and excitation temperature in a magnetic pole enhanced-inductively coupled argon plasma

        A.W. Khan,F. Jan,A. Saeed,M. Zaka-ul-Islam,M. Abrar,N.A.D. Khattak,M. Zakaullah 한국물리학회 2013 Current Applied Physics Vol.13 No.7

        Magnetic Pole Enhanced-Inductively Coupled Plasmas (MaPE-ICPs) in analogy to the conventional ICPs exhibit two modes of operation, depending on the power coupling mechanism, i.e., a low power mode with dominant capacitive coupling (E-mode) and a high power mode with dominant inductive coupling (H-mode). A comparative study of the electron temperature measured by a Langmuir probe ðTLP e Þ and the electron excitation temperature ðTOES exc Þ determined by Optical Emission Spectroscopy (OES) is reported in the two distinct modes of a MaPE-ICP operated in argon. The dependence of TLP e , TOES exc and their ratio ðTLP e =TOES exc Þ on applied power (5-50 W) and gas pressure (15-60 mTorr) is explored, and the validity of TOES exc as an alternative diagnostic to TLP e is tested in the two modes of MaPE-ICP. The OES based noninvasive measurement of the plasma parameters such as electron temperature is very useful for plasma processing applications in which probe measurements are limited.

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