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- 저자 : Lufan Zhang (검색결과 3 건)
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Lufan Zhang,Xue-li Li,Jiwen Fang,Yunhao Lv,Bing Ma,Jun Wu,Hu Li 한국정밀공학회 2019 International Journal of Precision Engineering and Vol.20 No.8
It is a limitation for rapid development of microelectronics manufacturing industry to hardly overcome the acceleration limitation of macro–micro motion platform. The paper presents an extended ultra-high acceleration macro–micro motion platform to investigate breakthrough of acceleration limitation with driving modes “macro + micro + macro” (MMM). In the proposed platform, the number of the pair of VCMs was defined as n. Under ultra-high acceleration, floating stator stage is suggested to isolate the vibration and obtain superior performance of the platform. Its theoretical analyses including natural frequency analysis, transient response analysis and frequency response analysis are performed to verify vibration isolation of floating stator stage applied in the extended ultra-high acceleration macro–micro motion platform. The change trends and sensitivities of related objective functions incorporating vibration transmissibility, settling time and the maximum stroke of stator’s motion are explored with their related parameters, and their multi-objective optimization designs are carried out to achieve superior performances of different extended platforms. Moreover, one case is performed when n = 1. Its theoretical analyses, change trends and sensitivities are investigated. The superior performance of the platform is obtained to realize vibration isolation by multi-objective optimization. And its experiment of vibration isolation is also testified finally. The results provide a theoretical and technical basis on microelectronics manufacturing equipment upgrading and manufacturing rapid development.
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Lufan Zhang,Boshi Jiang,Pengqi Zhang 대한기계학회 2023 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.37 No.1
In this paper, the ultra-high acceleration macro-micro motion platform flexible positioning platform is taken as the research object. First, the finite element modal analysis is performed using the finite element technique, and the natural frequencies and mode shapes of the flexible positioning platform are obtained. Then, using the response surface optimization design method, the low-order natural frequency of the flexible positioning platform is increased, and its mass is decreased. Finally, the experimental modal analysis of the flexible positioning platform is carried out, and the experimental modal parameters of the flexible positioning platform are calculated. The experimental results are basically consistent with the finite element analysis results, which verify the accuracy of the finite element modal analysis. The research results are of great significance to the development of the ultra-high acceleration macro-micro motion platform.
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Jiwen Fang,Lufan Zhang,Zhili Long,Michael Yu Wang 한국정밀공학회 2018 International Journal of Precision Engineering and Vol.19 No.10
This paper concerns hysteresis and creep of a piezo-actuated nano positioning stage. The hysteresis and creep, considered as bounded disturbance or uncertainty, are suppressed without a nonlinear model. An improved Fuzzy Adaptive Sliding Mode Control (FASMC) with a Proportional-Integral-Derivative sliding surface is designed to cancel both hysteresis and creep. However, the constant slopes of the sliding function may increase oscillations. Some variable gains with adaptive rules are introduced to overcome this drawback by changing the sliding function values online. Fuzzy control is applied to tune the switching control part to improve performance. Furthermore, an adaptation law is used to approximate the optimal value of the switching control. The stability of the sliding mode control law is proved in the sense of Lyapunov stability theorem. To eliminate chattering and obtain a smooth signal, the switching control is modified and a smooth function is introduced to substitute the signum function. An anti-saturation control is introduced to keep the input voltage within safety scope. Experimental results show that FASMC can achieve faster response for step input and sinusoid signal. Both hysteresis and creep of the piezoelectric actuator are suppressed by the proposed FASMC. Therefore, the FASMC can reduce the tracking errors of the piezo-actuated stage.
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