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김진호(Jinho Kim),신동익(Dongik Shin),윤덕원(Deokwon Yun),한창수(Changsoo Han),이상무(Sangmoo Lee),남경태(Kyungtae Nam) 한국생산제조학회 2008 한국생산제조학회지 Vol.17 No.1
Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.