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STM observation of initial stage of growth of Si-Mn films on Si(111)7 × 7 surface
Atsushi Yokotani,Ryota Kihara,Kohei Nakayoshi 한양대학교 세라믹연구소 2015 Journal of Ceramic Processing Research Vol.16 No.1
Recently, it has become very important to obtain knowledge about interactions between substrates and deposited materials in an atomic scale. In this study, we focused on the initial stage of Si-Mn films adsorbed on to a Si(111) substrate. A sample were prepared by depositing the Mn particles onto a cleaned Si(111) substrate by the pulsed laser deposition (PLD) method and the observation was performed with a scanning tunneling microscope (STM). First, we have observed adsorption site, size and shape of the particles at room temperature. Next, the change of the STM image at elevated temperature up to 200 o C was observed. In this paper, we have discussed about the structure of clustered Mn particles on Si(111) substrate by comparing the result with particles of other kinds.