http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Junya HIJIOKA,Hazime SHIRAISHI,Toru WATANABE,Kazuto SETO 대한기계학회 2015 대한기계학회 춘추학술대회 Vol.춘계 No.-
This paper deals with control system design for active isolation table. If elastic loads are put on the isolation table, vibration modes of the table are changed. Therefore, the controllers for the active isolation table should be designed taking account of elastic loads. According to this fact, a dynamical model must be identified that takes the dynamics of elastic loads into consideration for such controllers. In this research, an experimental active isolation table with an elastic load is built. Its dynamical model is identified by using experimental modal analysis or FEM analysis. A controller is designed by using the model according to sub-optimal control theory, absolute velocity feed-back control theory and feed-forward control theory. Property of the obtained controller is qualified through computer simulations and control experiments.