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      • KCI등재

        Flexible and patterned-free Ni/NiO-based temperature device on cylindrical PET fabricated by RF magnetron sputtering: Bending and washing endurance tests

        Alfred Bekoe Appiagyei,Jomaris Banua,한정인 한국공업화학회 2021 Journal of Industrial and Engineering Chemistry Vol.100 No.-

        Flexible Resistive Temperature Detectors (RTDs) based on metal thinfilm have broad applicationprospects in smart clothes, however, they are constructed with patterned metalfilms using complicatedmanufacturing processes. Herein, we report a simple radio frequency (RF) magnetron sputtering methodto fabricate light-weight, inexpensive andflexible temperature sensors (TS), whose sensitive materialsact as electrode itself composed of Ni, NiO and Ni/NiO bilayer thinfilms. The Ni/NiO bilayer TS could bebent in different radius with resistance change below 5% signifying highflexibility. Fabricated Ni/NiObilayer TS exhibited superior sensing performance with temperature coefficient of resistance (TCR) of3.8 10 3 C 1 compared to 3.2 10 3 C 1 and 3.110 3 C 1 for Ni and NiO thinfilms respectively. Itshowed a linear response with R2-value of 0.9852. The Ni/NiO bilayer TS showed TCR of 1.0 10 4 C 1even after 16,000 repetitive mechanical bends. Ni/NiO temperature sensor maintains high TCR towardsexposure to different chemical solutions (acid, alkaline, detergents). The easy-fabrication process withgood surface condition, together with the demonstrated results, suggest Ni/NiO is a promising candidateforflexible RTD device.

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