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      • KCI등재

        Effects of charge storage dielectric thickness on hybrid gadolinium oxide nanocrystal and charge trapping nonvolatile memory

        Jer-Chyi Wang,Chih-Ting Lin,Chi-Feng Chang 한국물리학회 2014 Current Applied Physics Vol.14 No.3

        The characteristics of hybrid gadolinium oxide nanocrystal (Gd2O3-NC) and gadolinium oxide charge trapping (Gd2O3-CT) memories were investigated with different Gd2O3 film thickness. By performing the rapid thermal annealing on Gd2O3 films with different thickness, the Gd2O3-NCs with the diameter of 6 e9 nm for charge storage, surrounded by the amorphous Gd2O3 (a-Gd2O3) layer, were formed. The a-Gd2O3 layer was considered to be the charge trapping layer, resulting in the large memory window of Gd2O3-NC/CT memories with thick Gd2O3 film. The charge trapping energy level of the Gd2O3-NCs and a-Gd2O3 layer was extracted to be 0.16 and 0.45 eV respectively by using the temperature-dependent retention measurement. Further, after a 106 program/erase cycling operation, the memory with thin Gd2O3 film can be predicted to sustain a 94% memory window of the first cycling one while the memory with thick Gd2O3 film suffered from a 30% charge loss because of the traps within the a-Gd2O3 layer. The Gd2O3 film thickness of 10 nm was optimized to exhibit superior performances of the Gd2O3-NC/CT memory, which can be applied into the nonvolatile memory.

      • KCI등재

        Low-damage NH3 plasma treatment on SiO2 tunneling oxide of chemically-synthesized gold nanoparticle nonvolatile memory

        Jer-Chyi Wang,Kai-Ping Chang,Chin-Hsiang Liao,Ruey-Dar Chang,Chao-Sung Lai,Li-Chun Chang 한국물리학회 2016 Current Applied Physics Vol.16 No.5

        Characteristics of chemically-synthesized (CS) gold nanoparticle (Au-NP) nonvolatile memories (NVMs) with low-damage NH3 plasma treatment on a tunneling oxide (TO) layer have been investigated. Although the dot density of CS Au-NPs is decreased, the programming efficiency of memories with optimized NH3 plasma treatment condition is enhanced due to the formation of a trapezoid-like energy band diagram of the TO layer by nitrogen incorporation. With the extraction of relative permittivity and electron affinity of the TO layer, the capacitance-voltage (C-V) and programming behaviors of CS Au-NP memories with low-damage NH3 plasma treatment on the TO layer are well-fitted by the TCAD (Technology Computer-Aided-Design) simulation. Further, the built-in electric field induced by the trapezoidlike energy band diagram of the TO layer can suppress the leakage current of the TO layer, thereby improving the data retention properties. The low-damage NH3 plasma treatment that results in no plasma damage to the TO layer has been proposed to be the probable candidate for future NVM applications.

      • KCI등재

        Charge storage characteristics of nonvolatile memories with chemically-synthesized and vacuum-deposited gold nanoparticles

        Jer-Chyi Wang,Chin-Hsiang Liao,Chih-Ting Lin,Ruey-Dar Chang,Li-Chun Chang,Chih-I Wu,Jung-Hung Chang 한국물리학회 2015 Current Applied Physics Vol.15 No.4

        Carrier injection and charge loss characteristics of nonvolatile memories with chemically-synthesized (CS) and vacuum-deposited (VD) gold nanoparticles (Au-NPs) have been investigated. Compared to CS counterparts, the memories with VD Au-NPs exhibit a higher dot density of 3.77 × 1011 cm-2, leading to a larger memory window. Further, the energy from valence-band edge to vacuum level (EVB_vac) of tunneling oxide for the samples with CS and VD Au-NPs is found to be 9.04 and 9.85 eV respectively. The small EVB_vac value of the memories with CS Au-NPs is resulted from the formation of a thin chemical oxide (SiOx) on thermally-grown SiO2 tunneling layer during the chemically synthesized process, contributing to a slow erasing behavior. Besides, the programming of the memories with VD Au-NPs is saturated at high gate bias, which has been well-explained by the electrons induced potential coupling between Au-NPs. Superior data retention property and high temperature dependence of charge loss are observed for the memories with CS Au-NPs, which can be ascribed to the thick tunneling oxide layer by the additional SiOx film.

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