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Direct Piezoelectricity of PZT Films and Application to Vibration Energy Harvesting
Hiroki Miyabuchi,Takeshi Yoshimura,Norifumi Fujimura,Shuichi Murakami 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.59 No.31
Direct piezoelectric effect of ferroelectric thin films was investigated to discuss the application of ferroelectric films to vibration energy harvesting. From the model of the piezoelectric vibration energy harvester, it was found that the figure of merit (FOM) is proportional to the square of the effective transverse piezoelectric coefficient e_(31,f). The e_(31,f) coefficient of Pb(Zr,Ti)O_3 films were measured by substrate bending method. The e_(31,f) coefficient of the 1-μm and 3-μm -thick PZT films are -6.1 C/m^2 and -9.1 C/m^2 at a compressive strain of 6 × 10^(-5), respectively Furthermore, it was found that the e_(31,f) coefficient increases with increasing the strain, which is favorable for the vibration energy harvesting.