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        Fabrication Tolerance of InGaAsP/InP-Air-Aperture Micropillar Cavities as 1.55-μm Quantum Dot Single-Photon Sources

        Shuai Huang,Xiumin Xie,Qiang Xu,Xinhua Zhao,Guangwei Deng,Qiang Zhou,You Wang,Hai-Zhi Song 한국광학회 2020 Current Optics and Photonics Vol.4 No.6

        A practical single photon source for fiber-based quantum information processing is still lacking. As a possible 1.55-µm quantum-dot single photon source, an InGaAsP/InP-air-aperture micropillar cavity is investigated in terms of fabrication tolerance. By properly modeling the processing uncertainty in layer thickness, layer diameter, surface roughness and the cavity shape distortion, the fabrication imperfection effects on the cavity quality are simulated using a finite-difference time-domain method. It turns out that, the cavity quality is not significantly changing with the processing precision, indicating the robustness against the imperfection of the fabrication processing. Under thickness error of ±2 nm, diameter uncertainty of ±2%, surface roughness of ±2.5 nm, and sidewall inclination of 0.5°, which are all readily available in current material and device fabrication techniques, the cavity quality remains good enough to form highly efficient and coherent 1.55-µm single photon sources. It is thus implied that a quantum dot contained InGaAsP/InP-air-aperture micropillar cavity is prospectively a practical candidate for single photon sources applied in a fiber-based quantum information network.

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