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        Localized Growth and Integration of Carbon Nanotubes on Micro-Hotplates

        Doan Duc Chanh Tin,Dang Mau Chien,Danick Briand,Gregor Schurmann,Nicolaas F. de Rooij 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.52 No.5

        This paper reports on the localized growth and integration of carbon nanotubes (CNTs) on micro-hotplates used as gas sensors. CNTs were grown directly on micro-hotplates coated with an optimized thickness of Ni catalyst by using the heat provided by the integrated micro-heater. The in uence of process parameters, such as the methane ow, the temperature and the growth time, was investigated to optimize the integration of the CNTs. We are developing Pt electrodes with a reduced gap by using e-beam lithography and investigating the application of an electric eld between these electrodes during CNTs growth to improve their electrical connection by orientating the direction of their growth to be perpendicular to the electrodes. This paper reports on the localized growth and integration of carbon nanotubes (CNTs) on micro-hotplates used as gas sensors. CNTs were grown directly on micro-hotplates coated with an optimized thickness of Ni catalyst by using the heat provided by the integrated micro-heater. The in uence of process parameters, such as the methane ow, the temperature and the growth time, was investigated to optimize the integration of the CNTs. We are developing Pt electrodes with a reduced gap by using e-beam lithography and investigating the application of an electric eld between these electrodes during CNTs growth to improve their electrical connection by orientating the direction of their growth to be perpendicular to the electrodes.

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