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Sunghyun Hwang,이준신,Byong-Deog Choi,Ho-Kyoon Chung,Hyungjun Park,JeoungIn Lee,Ki-Young Lee,Kyung-soo Jang,S. K. Dhungel,Sungwook Jung 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.51 No.3
In this paper, we report our investigation on the effect of the presence of a high concentration of nitrogen in a silicon-oxide layer deposited by using plasma-assisted nitrous-oxide oxidation. The results of the ellipsometric measurement, the capacitance-voltage characterization studies, and the processing conditions are presented. P-type silicon wafers with 10 20 ohm·cm resistivities, 4-inch diameter; and (100) orientations were used for the fabrication of metal-insulator-semiconductor (MIS) capacitors. The silicon-oxynitride films deposited using by an inductively-coupled-plasma chemical-vapor deposition (ICPCVD) method under three different process conditions. In the first case, the RF power and the substrate temperature were kept constant while the deposition time was varied from 1 to 30 minutes. In the second case, the substrate temperature and the deposition time were kept constant while the RF power was varied from 50 to 450 W. In the thirds experiment, the RF power and deposition time were fixed while the substrate temperature was varied from 150 to 550 C. In all above processes, the nitrous-oxide flow and the working pressure were kept constant. The results of the present study indicate the suitability of the deposited films for applications in ultra very thin film transistors (UVTFT) and NVM (nonvolatile memory) devices.`t홲`t
COSINE FUNCTIONAL EQUATION IN SEVERAL VARIABLES
CHUNG, JAEYOUNG,KO, SEUNGJUN,SONG, SUNGHYUN The Honam Mathematical Society 2005 호남수학학술지 Vol.27 No.1
Making use of a transparent way of convolution by tensor product of approximate identities we consider the cosine functional equation in several variables.
Yoon Sunghyun,Chung Yongchul G. 대한화학회 2021 Bulletin of the Korean Chemical Society Vol.42 No.11
There has been a recent report regarding the existence of solid-like H2 adsorption in nanoporous materials. Herein, we employed grand canonical Monte Carlo (GCMC) simulations on a series of metal–organic frameworks with 1D and 3D channels to investigate the limitation of a model-based approach in estimating the H2 adsorption capacities. The excess hydrogen uptakes of several structures with pore sizes ranging from 5 to 37 Å were computationally predicted. The pore volume and the density of adsorbed H2 were obtained by fitting the Toth equa- tion to the excess H2 isotherm data from the simulation. The results were compared with the data obtained from direct simulation. Sensitivity analyses show that the pore volume and the density of adsorbed H2, predicted from modelbased fitting, are not accurate enough to estimate the adsorbed H2 density and the pore volume, especially for the materials with 1D channels