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        The Characterization of Cu-Doped ZnO Thin Films Prepared by Using Radio-Frequency Reactive Magnetron Sputtering

        Chaoqun Cai,Hongqiang Zhang,Jun Xie,Ligang Ma 한국물리학회 2017 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.70 No.9

        Textured zinc-oxide (ZnO) thin films and Cu-doped ZnO (ZnO:Cu) thin films are deposited on glass substrates by using radio-frequency reactive magnetron sputtering. The effect of Cudoping concentration on the crystallization behavior, surface morphology, transmission spectrum, and luminescence properties of the ZnO thin films are systematically investigated by using X-ray diffraction, scanning probe microscopy and photoluminescence spectra. The results indicate that the crystallization quality, morphology, transmission, and luminescence of the ZnO films is affected by Cu-element doping. A stronger preferred orientation toward the c-axis is obtained after Cu doping at an appropriate concentration (3%). The transmittance rate gradually decreases with increasing Cu doping concentration. In the photoluminescence spectra of the samples measured at room temperature, four main emission peaks are observed: a violet peak located at about 390 nm, two blue peaks, one located at about 445 nm and the other at about 485 nm, and a green peak located at about 527 nm. The origins of these emissions are discussed in detail.

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