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Time Efficient Evaluation of Multi-axis MEMS Gyroscope Using Three-dimensional Test Methodology
Faisal Iqbal,Hussamud Din,Byeungleul Lee 대한전자공학회 2019 Journal of semiconductor technology and science Vol.19 No.6
Recently, the demand for micro-electromechanical systems (MEMS) based inertial sensors has been increased due to a wide range of application in consumer electronics; however, high volume production remains a major challenge for the MEMS industry. This paper proposes a new three dimensional (3-D) test methodology for the time-efficient evaluation of multi-axis MEMS gyroscopes. A mathematical model for the proposed 3-D test method was derived based on the coordinates transformation. The 3-D test methodology was validated experimentally using three-axis MEMS gyroscope from ST Microelectronics and the results were compared with the conventional one dimensional (1-D) test method. The experimental results revealed that the measurement error between the conventional 1-D and the proposed 3-D test was less than 1%, whereas the test time was decreased three times. Finally, the error sources and limitations of the proposed 3-D test method was highlighted.
Scaling effects of a fine-pitched and vertically guided MEMS probe card
Likun Zhu,Bong-Hwan Kim,Ki Sung Lee,Byeungleul Lee,Kukjin Chun 대한전자공학회 2009 ITC-CSCC :International Technical Conference on Ci Vol.2009 No.7
In this paper, we proposed scaling of MEMS probe card which was developed with a fine-pitched and vertically guided probe structure. The probe structure was mechanically stable and movable only for vertical direction due to a deeply recessed trench. We also considered fabrication limitations such as through-hole etching, electroplating, and planarization of wafer for implement a fine-pitched device.
Faisal Iqbal,Hussamud Din,Seungoh Han,Byeungleul Lee 대한전자공학회 2021 Journal of semiconductor technology and science Vol.21 No.6
This paper presents a new coupling spring design for the MEMS tuning fork structure. The spring design incorporates the outer arm, inner arm, and torsional arm. The outer and inner arms are connected through the torsional arm to be rotationally symmetric, constituting 180° in relation to the center of spring. The designed coupling spring always prioritizes an anti-phase motion providing robustness to linear acceleration. The operation of the spring was validated through FEM simulations and experimental results. The experimental results demonstrated that the anti-phase resonant frequency was 27,280 Hz, whereas the in-phase resonant frequency was 27,780 Hz. Furthermore, the designed coupling spring benefited from a narrow etch cavity and small surface area, making it an ideal design for consumer electronics applications.