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이학선(Hakseon Lee),남상혁(Sanghyuk Nam),강성원(Seongwon Kang) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
Underwater laser cutting is a promising technology in the nuclear facility dismantling and shipbuilding industry because it is safer and cleaner than dry laser cutting. However, due to harsh condition of multiphase compressible flow, the underwater laser cutting simulation is relatively less studied. This study conducted RANS simulations for air and underwater laser cutting with supersonic assist gas. Then, we evaluated the cutting performance via a parametric study. A stiffened equation of state is used to model two-phase compressible flow. The high thermal conductivity of the material decreased the temperature at the cutting area, which can degrade the cutting performance. This effect becomes important in the underwater cutting condition.
회전하는 웨이퍼 위의 세정액 발달 및 분리 현상에 대한 시뮬레이션 해석
원종찬(Jongchan Won),원윤재(Yoonjae Won),윤현근(Hyeongeun Yun),이진욱(Jinwook Lee),이학선(Hakseon Lee),강성원(Seongown Kang) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
We perform resolved simulations and examined development and break-up of cleaning liquid over a rotating wafer. The effects of the rpm, flow rate, jet angle, diameter, and contact angle are examined. The effects of cleaning liquid are examined in several ways including the coverage, wall shear stress, application time. Instantaneous flow fields show development of many small-sized liquid ligaments that are affected strongly by the contact angle. For a higher hydrophobicity, a smaller coverage value and faster film break-up are observed. It is shown that the coverage value is not related to the jet diameter and strongly related to the flow rate and rpm.