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김병희(B. H. Kim),전성건(S. K. Jeon),김헌영(H. Y. Kim),전병희(B. H. Jeon) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4
Ultrasonic Machining process is an efficient and economical means of precision machining on glass<br/> and ceramic materials. However, the mechanics of the process with respect to crack initiation and<br/> propagation, and stress development in the ceramic workpiece subsurface are still not well understood.<br/> In this research, we investigate the basic mechanism of chemical assisted ultrasonic machining(CUSM)<br/> of glass through the experimental approach. For the purpose of this study, we designed and fabricated<br/> the desktop micro ultrasonic machine. The feed is controlled precisely by using the constant load<br/> control system. During the machining experiment, the effects of HF(hydrofluoric acid) characteristics<br/> and machining condition on the surface roughness and the material removal rate are measured and<br/> compared.
펨토초 레이저를 이용한 박막 재료 및 기판 변화에 따른 가공 특성에 관한 연구
김병희(B. H. Kim),신홍규(H. G. Shin),이종길(J . G. Lee),정세채(S. C. Jeong) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
We have investigated the behavior of the ultra fast laser ablation of chromium films (200㎚) on the silicon and pyrex glass(corning 7740) substrate with respect to the laser fluence and the number of laser pulses. In addition, several experiments about ITO thin film were carried out with femto- second Ti:Sapphire laser (150fs). Fin ally, we introduce the ablation characteristic in accordance with materials of thin film and substrate.