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PECVD 에 의해 형성된 Diamondlike Carbon 박막에서 DC Self Bias 및 보조 gas 가 광학적 성질에 미치는 영향
김한,황인오,주승기 대한금속재료학회(대한금속학회) 1993 대한금속·재료학회지 Vol.31 No.1
Diamondlike carbon thin films were prepared on Si (001) wafer by plasma enhanced chemical vapor deposition and we observed the variation of the optical band gap of DLC thin films with respect to deposition condition. The change of the optical band gap of the DLC thin films was investigated as a function of DC self bias which was the most important variable in PECVD and the secondary gas. When DC self bias was applied, the optical band gap decreased monotonously and when DC self bias was not applied, the degree of the change of the optical band gap decreased greatly. The change of the optical band gap had a close relation with the concentration of C-H bond in DLC thin films and the content of hydrogen decreased with the increase of DC self bias and we could verify these results by using FT-IR spectroscopy. And, It was seen that nitrogen and hydrogen gas used for secondary gas had a role of increasing the decreasing rate of the optical band gap by the breakage of C-H bond of DLC thin films during the deposition.