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PECVD방법으로 형성한 $W_{67}N_{33}$/GaAs구조의 열적 특성
이세정,홍종성,이창우,이종무,김용태,민석기,Lee, Se-Jeong,Hong, Jong-Seong,Lee, Chang-U,Lee, Jong-Mu,Kim, Yong-Tae,Min, Seok-Gi 한국재료학회 1993 한국재료학회지 Vol.3 No.5
실리콘이 주입된 CaAs 기판위에 플라즈마 화학 증착법으로 자기정렬 gate구조의 Schottky contact을 형성하였다. 갈륨비소 소자 제조를 위하여 두께 1600$\AA$의 턴스텐질화막을 $350^{\circ}C$에서 증착하여 $750^{\circ}C$에서 $900^{\circ}C$까지 급속 열처리 하였다. 텅스텐 질화막과 GaAs계면의 열적 안정성을 XRD(X-ray diffraction), PL(photoluminescence),ODLTS(optical deep livel transient spectroscopy)측정으로 조사하였으며, W보다 $W_{67}N_{33}$ gate를 형성시킬 경우에 GaAs에 미치는 열적손상이 적음을 알 수 있으며 이온 주입한 Si이온이 활성화 되는 것으로 생각된다. $W_{67}N_{33}$ GaAs 다이오드가 약 800-$900^{\circ}C$의 고온열처리 온도에서 W/GaAs 다이오드의 경우보다 열적 안정성이 우수하였다. Self-alignment gatc Schottky contact structure on Si- implanted GaAs was formed by plasma enhanced chemical vapor dcposirion. Tungsten nitride thin films (ahclut 1600$\AA$) \vcre dopositcd on GaAs at $350^{\circ}C$ in order to fahricarc GaAs 1Cs and ttwn rapidly annealed at $750^{\circ}C$ to $900^{\circ}C$. Thermal charac tcristics of PECVD)-$W_{67}N_{43}$/GaAs structure were investigated by X-ray diffraction, photolumintesccnce. and optical deep level transient specrroscopy. Results revealed that $W_{67}N_{33}$ gate was more thermally sta ble with GaAs substrate than W gate and Si atoms implanted In $W_{67}N_{33}$/GaAs structure became morr active than those In W/GaAs after annealing. I-V characteristics of $W_{67}N_{33}$/GaAs diod c exhibired a nearly ideal diode behavior. The termal stability of $W_{67}N_{33}$/GaAs diode was better than that of W/GaAs diode with the post annealing at temperatures from 800 to $900^{\circ}C$ for 20s without As overpressure.
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이희영(Lee Hee-Young),박근동(Park Keun-Dong),양성돈(Yang Sung-Don),홍종성(Hong Jong-Seong),우성원(Woo Sung-Wo),김민우(Kim Min-Woo) 한국철도학회 2009 한국철도학회 학술발표대회논문집 Vol.2009 No.11월
As cities have expanded, public transportation systems are focused on city urban railroad. However, subway is no more attractive due to its high construction cost. As a result, a new system - LRT(Light Rail Transit) is presented as an alternative system. One of the LRT - monorail system has been chosen by Daegu Metropolitan City Government for the urban railroad line 3, owing to its low construction cost and positive effect for city scopes. But monorail system has a complex problem on wiring, turn-out system. So engineers who design to apply monorail depot have to check into these matter. This paper introduces overseas cases of monorail depot for reference, outline of the planning structure in depot, go out depot line plan related to manless operating and result of simulation on depot operation. We hope this contents are helpful for engineers who are interested in the monorail depot.
ScienceON
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