http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
고 세장비 마이크로 음각 패턴을 갖는 금속 몰드 제작을 위한 기계가공 및 전주도금 공정 개술 개발
한정진(J. Han),김민수(M. Kim),김태경(T. Kim),신륭(R. Shin),유영은(Y. E. Yoo),제태진(T. J. Je),강신일(S. Kang) 한국소성가공학회 2012 한국소성가공학회 학술대회 논문집 Vol.2012 No.5
This paper describes a novel method for fabricating a metallic mold with narrow high-aspect-ratio intaglio micro pattern structures, hole and groove pattern width of 10 ㎛, and aspect ratio 4.0. Creating such structures by conventional micromachining with a 10-㎛-wide tool tip is difficult or even impossible. We first fabricated pattern structures with width of 10 ㎛ and height of 40 ㎛ by micro machining process with wider tool, and replicated metallic mold to form inverse structures by electroforming process. A passivation layer was used to prevent diffusion between the brass master and the electroformed metallic mold during electroforming. We demonstrated the feasibility of this process by measuring and analyzing the patterns imprinted using the metallic mold.
비표지식 단백질 센서 성형을 위한 금속 나노스탬프 제작에 관한 연구
김태경(T. Kim),한정진(J. Han),제순규(S. Je),김민수(M. Kim),신륭(R. Shin),강신일(S. Kang) 한국소성가공학회 2012 한국소성가공학회 학술대회 논문집 Vol.2012 No.10
This paper describes a novel method to fabricate a metallic nano stamp for label-free protein sensor. We investigated a mass production method of label-free protein microarray chip integrated with micro-well structures which depth is 150㎛ for the use of miniaturized multi parallel detection system. In the process of fabricating metallic stamp from polymer master, deposition of seed layer is essential. However, such depth caused difficulty in depositing seed layer on the sidewall by e-beam evaporation process. We demonstrated multi-step LIGA process to ease the issue and introduced PRC electroforming process to enhance mechanical properties of metallic nano stamp. The metallic nano stamp was fabricated by the proposed processes and applied to UV nanoimprinting process for replicating the protein micro-array chip.